Design and Characteristics of P-type FinTFT for RF and HV Applications / P型鰭式薄膜電晶體於高頻與高電壓應用之設計和特性化分析

碩士 / 國立臺北科技大學 / 電子工程系 / 107 / This thesis will be divided into three major themes, to discuss P-type FinTFT for different processes separately, and analyze the DC characteristics, high-frequency characteristics, breakdown voltage or leakage characteristics of each devices application coverage. First, we discuss the DC and high-frequency characteristics of RF FinTFT for different drain extend structure design to optimize the structural design. The second part, we discuss the gate-induced drain leakage characteristics of HV FinTFT, the process are as same as the first part, only layout and doping range are different, and through the variable-temperature measurement to analyze its leakage mechanism. Finally, an RF junctionless FinTFTs will be fabricated and an S/D asymmetric doping method will be used to improve the breakdown voltage, also discuss the performance of this design on DC characteristics, high-frequency characteristics and low-frequency noise.
In the process of measurement of transfer, the main parameters are threshold voltage, subthreshold swing, DIBL, and breakdown voltage. High-frequency measurements focused on the analysis of cutoff frequency and maximum oscillation frequency and small-signal parameters to discuss important parameters. According to its result, this paper can provide a guideline for future device design and fabrication for applied to system on panel (SoP).

Identiferoai:union.ndltd.org:TW/107TIT00427093
Date January 2019
CreatorsHUANG,CHUN-LIN, 黃俊霖
ContributorsHU,HSIN-HUI, 胡心卉
Source SetsNational Digital Library of Theses and Dissertations in Taiwan
Languagezh-TW
Detected LanguageEnglish
Type學位論文 ; thesis
Format100

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