In this master thesis the effects of the process parameters of pp-HMDSO were studied in the application of corrosion protection of an Al surface. The method for polymerising the HMDSO vapour was RF-PECVD. The following process parameters were studied: RF-power, flow of HMDSO, Oxygen as reactive gas, Ar as inert gas, the effect of applied bias voltage, as well as Ar etch as pre-treatment and subjecting the film to a pure O2 plasma as post-treatment. The results were a prolonging of the total decay time of the Al film when subjected to a 1M NaOH solution. The decay time increased from 5-20s for an unprotected Al film to 140min for the best pp-HMDSO coating. SEM/EDX, XRR, L*a*b* were used when analysing the pp-HMDSO films. The best performing coatings were tested on reflectors and passed the industry standard test of being subjected to a 0.1M NaOH for 5min without visible corrosion or decay.
| Identifer | oai:union.ndltd.org:UPSALLA1/oai:DiVA.org:liu-149909 |
| Date | January 2017 |
| Creators | Ardic, Madeleine, Gifvars, Anton |
| Publisher | Linköpings universitet, Tunnfilmsfysik, Linköpings universitet, Tunnfilmsfysik |
| Source Sets | DiVA Archive at Upsalla University |
| Language | English |
| Detected Language | English |
| Type | Student thesis, info:eu-repo/semantics/bachelorThesis, text |
| Format | application/pdf |
| Rights | info:eu-repo/semantics/openAccess |
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