Phase shifting interferometry is one of the most promising methods for testing aspheres. However, one will encounter the following problems when it is applied to test an asphere: (1) very tight fringes produced by a strong asphere exceed the test system's resolution, (2) a test wavefront suffers from system aberrations of the interferometer that cause measurement errors, and (3) the wavefront immediately after reflection does not necessarily represent the shape of the test asphere. This thesis used a high density array sensor to detect the dense fringes. In order to solve the system aberration and the ray retrace problems, it is necessary to incorporate a ray trace code and phase shifting interferometry. This measurement principle was applied for an aspheric surface whose asphericity was 100 waves. A phase shifting Fizeau interferometer was incorporated with an optical design program. The attained accuracy was approximately one-tenth of a wave.
| Identifer | oai:union.ndltd.org:arizona.edu/oai:arizona.openrepository.com:10150/276944 |
| Date | January 1989 |
| Creators | Kurita, Hiroyuki, 1958- |
| Contributors | Wyant, James C. |
| Publisher | The University of Arizona. |
| Source Sets | University of Arizona |
| Language | en_US |
| Detected Language | English |
| Type | text, Thesis-Reproduction (electronic) |
| Rights | Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author. |
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