A defect detection algorithm applicable for periodic VLSI circuitry is presented in this thesis. Even though the algorithm is based on the reference comparison approach, the periodicity of the circuit eliminates the need for the so called "golden wafer." The suggested algorithm has demonstrated the ability to detect defects of small area (0.023% of the image area). In addition, the algorithm was 93% successful in defect detection and has a false alarm rate of 0.067 per inspected frame, based on testing 20 frames.
| Identifer | oai:union.ndltd.org:arizona.edu/oai:arizona.openrepository.com:10150/277265 |
| Date | January 1990 |
| Creators | Malhis, Luai Mohammed, 1964- |
| Contributors | Strickland, Robin N. |
| Publisher | The University of Arizona. |
| Source Sets | University of Arizona |
| Language | en_US |
| Detected Language | English |
| Type | text, Thesis-Reproduction (electronic) |
| Rights | Copyright © is held by the author. Digital access to this material is made possible by the University Libraries, University of Arizona. Further transmission, reproduction or presentation (such as public display or performance) of protected items is prohibited except with permission of the author. |
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