In the fringe-illumination deflectometry based on reverse-Hartmann-test configuration, ray tracing of the modeled testing system is performed to reconstruct the test surface error. Careful calibration of system geometry is required to achieve high testing accuracy. To realize the high-precision surface testing with reverse Hartmann test, a computer-aided geometrical error calibration method is proposed. The aberrations corresponding to various geometrical errors are studied. With the aberration weights for various geometrical errors, the computer-aided optimization of system geometry with iterative ray tracing is carried out to calibration the geometrical error, and the accuracy in the order of sub-nanometer is achieved.
| Identifer | oai:union.ndltd.org:arizona.edu/oai:arizona.openrepository.com:10150/627168 |
| Date | 23 August 2017 |
| Creators | Wang, Daodang, Gong, Zhidong, Xu, Ping, Liang, Rongguang, Kong, Ming, Zhao, Jun, Wang, Chao, Mo, Linhai, Mo, Shuhui |
| Contributors | Univ Arizona, Coll Opt Sci |
| Publisher | SPIE-INT SOC OPTICAL ENGINEERING |
| Source Sets | University of Arizona |
| Language | English |
| Detected Language | English |
| Type | Article |
| Rights | © (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). |
| Relation | https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10373/2268372/Geometrical-error-calibration-in-reflective-surface-testing-based-on-reverse/10.1117/12.2268372.full |
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