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Laser studies of species involved in plasma etching processes

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1. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.233432

Identifer	oai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:233432
Date	January 1988
Creators	Booth, J. P.
Publisher	University of Oxford
Source Sets	Ethos UK
Detected Language	English
Type	Electronic Thesis or Dissertation