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Argon and argon-chlorine plasma reactive ion etching and surface modification of transparent conductive tin oxide thin films for high resolution flat panel display electrode matrices

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1. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.243741

Identifer	oai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:243741
Date	January 1997
Creators	Molloy, James
Publisher	University of Ulster
Source Sets	Ethos UK
Detected Language	English
Type	Electronic Thesis or Dissertation