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Lithographic characterisation of a selection of polymeric resists for microlithographic applications

No description available.
Identiferoai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:244327
Date January 1997
CreatorsMurphy, Julian James
PublisherUniversity of Kent
Source SetsEthos UK
Detected LanguageEnglish
TypeElectronic Thesis or Dissertation

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