Return to search

Electron beam lithography for the microfabrication of integrated optical devices

No description available.

1. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.351299

Identifer	oai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:351299
Date	January 1984
Creators	Campbell, N. J.
Publisher	University of Cambridge
Source Sets	Ethos UK
Detected Language	English
Type	Electronic Thesis or Dissertation