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Techniques and applications of very high resolution electron-beam lithography

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1. http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.372412

Identifer	oai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:372412
Date	January 1984
Creators	Mackie, William Stuart
Publisher	University of Glasgow
Source Sets	Ethos UK
Detected Language	English
Type	Electronic Thesis or Dissertation
Source	http://theses.gla.ac.uk/2833/