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Thin-film silicon based MEMS actuators and materials

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Identiferoai:union.ndltd.org:bl.uk/oai:ethos.bl.uk:609898
Date January 2011
CreatorsMilne, Stuart Brian
PublisherUniversity of Cambridge
Source SetsEthos UK
Detected LanguageEnglish
TypeElectronic Thesis or Dissertation

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