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The study of the solid acceptance angle in quantitative X-ray photoelectron spectroscopy.

by Ka-wai Wong. / Thesis (M.Phil.)--Chinese University of Hong Kong, 1995. / Includes bibliographical references (leaves 106-109). / TABLE OF CONTENTS --- p.i / ABSTRACT --- p.v / LIST OF FIGURES --- p.vi / LIST OF TABLES --- p.xi / LIST OF ABBREVIATIONS --- p.x / Chapter Chapter 1 --- Research Background --- p.1 / Chapter 1.1 --- Introduction --- p.1 / Chapter 1.2 --- The effect of solid acceptance angle --- p.2 / Chapter 1.3 --- Research goals --- p.4 / Chapter 1.3.1 --- Determination of the electron spectrometer transmission function --- p.4 / Chapter 1.3.2 --- Novel depth profiling technique by adjusting the solid acceptance angle --- p.6 / Chapter 1.3.3 --- Correction to conventional ARXPS --- p.8 / Chapter 1.4 --- Thesis Structure --- p.8 / Chapter Chapter 2 --- Fundamentals of X-ray Photoelectron Spectroscopy --- p.9 / Chapter 2.1 --- Introduction --- p.9 / Chapter 2.2 --- X-ray Photoelectron Spectroscopy (XPS) --- p.9 / Chapter 2.2.1 --- Basic principles --- p.9 / Chapter 2.2.2 --- Surface sensitivity --- p.11 / Chapter 2.2.3 --- A typical XPS spectrum --- p.13 / Chapter 2.3 --- Qualitative analysis --- p.16 / Chapter 2.3.1 --- Binding energy --- p.16 / Chapter 2.3.2 --- Chemical state information --- p.17 / Chapter 2.4 --- Quantitative analysis --- p.20 / Chapter 2.4.1 --- Factors affecting intensity --- p.20 / Chapter 2.4.2 --- Homogeneous materials --- p.22 / Chapter 2.4.3 --- Layer structure --- p.23 / Chapter Chapter 3 --- Instrumentation --- p.26 / Chapter 3.1 --- XPS spectrometer --- p.26 / Chapter 3.1.1 --- Magnetic immersion lens system --- p.26 / Chapter 3.1.2 --- Tunable iris --- p.29 / Chapter 3.1.3 --- Scan plates --- p.29 / Chapter 3.1.4 --- Input lens aperture --- p.32 / Chapter 3.2 --- Calibration of the iris --- p.32 / Chapter 3.3 --- Applications --- p.35 / Chapter 3.3.1 --- Two dimensional XPS imaging --- p.35 / Chapter 3.3.2 --- ARXPS --- p.37 / Chapter 3.4 --- Summary --- p.37 / Chapter Chapter 4 --- Determination of electron spectrometer transmission function --- p.38 / Chapter 4.1 --- Introduction --- p.38 / Chapter 4.2 --- Traditional method of determination --- p.39 / Chapter 4.3 --- Methodology of the novel approach --- p.40 / Chapter 4.4 --- Calculation Procedures and Results --- p.48 / Chapter 4.5 --- Results and Discussions --- p.50 / Chapter 4.6 --- Conclusions --- p.57 / Chapter Chapter 5 --- "Depth Profiling by Adjusting the Solid Acceptance Angle: a Starting Point to “ Three-Dimensional Imaging""" --- p.59 / Chapter 5.1 --- Introduction --- p.59 / Chapter 5.2 --- Theoretical Background --- p.60 / Chapter 5.2.1 --- Quantification of Intensity --- p.60 / Chapter 5.3 --- Experimental --- p.69 / Chapter 5.3.1 --- Operation --- p.69 / Chapter 5.3.2 --- Calibration of iris --- p.70 / Chapter 5.3.3 --- Novel depth profile by adjusting the solid acceptance angle --- p.71 / Chapter 5.4 --- Results and Discussions --- p.71 / Chapter 5.4.1 --- Depth Profiles --- p.71 / Chapter 5.4.2 --- "Concept of ""Three-Dimensional XPS Imaging""" --- p.72 / Chapter 5.5 --- Conclusions --- p.76 / Chapter Chapter 6 --- Correction to Quantitative X-ray Photoelectron Spectroscopy with Consideration of the Solid Acceptance Angle --- p.79 / Chapter 6.1 --- Introduction --- p.79 / Chapter 6.2 --- The effect of the solid acceptance angle --- p.80 / Chapter 6.3 --- Theoretical Background --- p.83 / Chapter 6.4 --- Results and Discussions --- p.87 / Chapter 6.4.1 --- Homogeneous Sample --- p.87 / Chapter 6.4.2 --- Layer structure --- p.90 / Chapter 6.4.3 --- Simulation plots and further investigation --- p.92 / Chapter 6.5 --- Conclusions --- p.101 / Chapter Chapter 7 --- Conclusion --- p.103 / Acknowledgment --- p.105 / References --- p.106

Identiferoai:union.ndltd.org:cuhk.edu.hk/oai:cuhk-dr:cuhk_320579
Date January 1995
ContributorsWong, Ka-wai., Chinese University of Hong Kong Graduate School. Division of Chemistry.
PublisherChinese University of Hong Kong
Source SetsThe Chinese University of Hong Kong
LanguageEnglish
Detected LanguageEnglish
TypeText, bibliography
Formatprint, xi, 109 leaves : ill. (some col.) ; 30 cm.
RightsUse of this resource is governed by the terms and conditions of the Creative Commons “Attribution-NonCommercial-NoDerivatives 4.0 International” License (http://creativecommons.org/licenses/by-nc-nd/4.0/)

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