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Opto- and Electro-Mechanical coupling between the depletion and the piezoelectric region of a Gallium Arsenide (GaAs) Micro Torsional Resonator Photodiode

In this work, the opto-piezo actuation and piezoelectric actuation in gallium arsenide
(GaAs) is experimentally and theoretically verified. Experimentally the response of the respective actuations are measured using the current generated from the inverse piezoelectric
effect. The mechanical structure used to generate this current is a micron size torsional
resonator fabricated from a GaAs photodiode heterostructure. The photodiode heterostructure is optically and electrically designed as a photovoltaic (PV) cell while mechanically the
structure resembles a bimorph. The bimorph design is a result of the PV cell consisting of a
pn junction and a heterojunction where the depletion regions have the additional property of
being piezoelectric. The opto-piezo actuation results from using the photogenerated voltage
to piezoelectrically drive a mechanical structure. Using light modulated at the resonance
frequency of the torsional resonator the measured current is shown to linearly increase with
intensity. For the electrical actuation case, the torsional resonator is driven using the non-
linear response of the pn junction to an applied voltage. The non-linear response results
in generation of voltage at the harmonic frequencies of the applied voltage. The voltage
generated at twice the applied frequency is given the label 2f and is used to piezoelectrically
drive the mechanical structure. The above results for the two methods of actuation are
theoretically validated by deriving a model for the expected current. The model predicts the
current as a function of the voltage. For the opto-piezo case this voltage is the photovoltage.
The photovoltage is determined using the AC PV model. This model is derived using the
DC PV model and predicts the AC operation of a photodiode in the 3rd and 4th quadrants
to resistive and reactive loads. Using the opto-mechanical coupling coefficient the efficiency
of the opto-piezo actuation is compared to opto-thermal actuation and radiation pressure
actuation. It is shown that the opto-piezo effect, in general, is several orders of magnitude
better than the other two in converting optical energy into mechanical energy. This is an
important result because in situations where low optical powers are only available and power,
in general, cannot be spared, for e.g. on a satellite, devices that make use of the opto-piezo
effect could be used for either actuation or sensing. Generally however, using the opto-piezo
effect can lead to either integration of existing photonic devices with mechanical resonators
or new photonic devices all together. For e.g. using the opto-piezo effect an adaptable optical
correlator can be made which could be used to make artificial intelligent machines. / Thesis / Doctor of Philosophy (PhD)

Identiferoai:union.ndltd.org:mcmaster.ca/oai:macsphere.mcmaster.ca:11375/20979
Date January 2017
CreatorsRampal, Abhishaik
ContributorsKleiman, Rafael, Engineering Physics
Source SetsMcMaster University
LanguageEnglish
Detected LanguageEnglish
TypeThesis

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