Thesis (MTech (Technology))--Cape Peninsula University of Technology, 2007 / Most ofMEMS sensors are based on the micro-cantilever technology, which use wide range of different
design materials and structures. The benefit ofMEMS technology is in developing devices having
lower cost, lower power consumption, higher performance, and integration. A free-end cantileverbeam
made of magnetic material (PerrnaIloy) and a movable mass attached to the free-end has been
designed using MEMS software tools. The magnetic material was used to improve the sensitivity of
the cantilever-beam to an external applied magnetic field. The deflection of the cantilever was detected
using capacitive sensing method. The aim of this research was to develop a non-contact current sensor
based on MEMS technology by analysing the simulation of the system design of the micro cantilever
when subjected to a magnetic field produced by a current-carrying conductor. When the signal, a sinusoidal
current with a constant frequency is applied, the cantilever-beam exhibits a vibration motion
along the vertical axis when it is placed closer to the line current. This creates corresponding capacitance
changes and generates a voltage output proportional to the capacitive change in the signal processing
circuitry attached to the micro cantilever.
Modelling of the magnetic moment of a magnetic cantilever-beam placed in a field, the deflection of
{ the beam, the natural frequency of the cantilever-beam, the maximum deflection, the change in differential
capacitive sensing technique, linearity of the differential capacitive, and capacitive sensitivity
the circuit designed for readout was derived.
| Identifer | oai:union.ndltd.org:netd.ac.za/oai:union.ndltd.org:cput/oai:localhost:20.500.11838/1082 |
| Date | January 2007 |
| Creators | Mustafa, Haithem Ali Babiker |
| Publisher | Cape Peninsula University of Technology |
| Source Sets | South African National ETD Portal |
| Language | English |
| Detected Language | English |
| Type | Thesis |
| Rights | http://creativecommons.org/licenses/by-nc-sa/3.0/za/ |
Page generated in 0.0025 seconds