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Metoda napěťového kontrastu v ESEM / Method of Voltage Contrast in ESEM

This graduation thesis deals with the problem of voltage contrast in ESEM. The purpose of this work was to verify influence of used detectors in the dependence on conditions in specimen chamber on the size of voltage contrast. With the conditions in specimen chamber we understand pressure and working conditions of signal detection. We used power transistor as specimen.

Identiferoai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:217627
Date January 2008
CreatorsBuchta, Michal
ContributorsČernoch, Pavel, Jirák, Josef
PublisherVysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií
Source SetsCzech ETDs
LanguageCzech
Detected LanguageEnglish
Typeinfo:eu-repo/semantics/masterThesis
Rightsinfo:eu-repo/semantics/restrictedAccess

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