This work deals with the fabrication of closed cavities in Low Temperature Co-Fired Ceramics (LTCC). In recent years, the LTCC ceramics have become widely used in the areas of sensors, MEMS and micro-fluidic applications. When fabricating such devices, it is important that the cavities maintain their compactness and dimensions after the manufacturing process . This is achieved primarily with the right choice of lamination process and its parameters and also by appropriate setting of the firing profile. The theoretical part describes the various steps in the production of LTCC structures and the most common technological processes used for creating structures with cavities and micro - channels . In the practical part are selected laminating procedures performed on the test pattern, which contains cavities of different sizes. Emphasis was placed on the correct execution of each method , while gradually modifying the lamination parameters. The achieved results are further discussed in terms of process parameters and their influence on the dimensions of manufactured cavities.
| Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:221036 |
| Date | January 2014 |
| Creators | Dóczy, Robert |
| Contributors | Somer, Jakub, Štekovič, Michal |
| Publisher | Vysoké učení technické v Brně. Fakulta elektrotechniky a komunikačních technologií |
| Source Sets | Czech ETDs |
| Language | Czech |
| Detected Language | English |
| Type | info:eu-repo/semantics/masterThesis |
| Rights | info:eu-repo/semantics/restrictedAccess |
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