This thesis is devoted to the behavior of heavy metals in gettering multilayers made of polysilicon and silicon oxide.
| Identifer | oai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:229005 |
| Date | January 2010 |
| Creators | Gretz, Leoš |
| Contributors | Lysáček, David, Bábor, Petr |
| Publisher | Vysoké učení technické v Brně. Fakulta strojního inženýrství |
| Source Sets | Czech ETDs |
| Language | Czech |
| Detected Language | English |
| Type | info:eu-repo/semantics/masterThesis |
| Rights | info:eu-repo/semantics/restrictedAccess |
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