Výroba, tepelné zpracování a charakterizace tenkých vrstev slitin NiTi / Fabrication, heat treatment and characterization of thin layer NiTi alloys

NiTi alloys with nearly equiatomic chemical composition are the most studied and the most practically utilized materials from the group of the shape memory alloys (SMA). The NiTi alloy has a thermoelastic martensitic transfor- mation (MT), which its two most important properties are based on: the shape memory and the superelasticity. Thin films of NiTi alloys with thicknesses from hundreds of nm to units of µm have a wide use mainly in microelectromechanical systems (MEMS). The doctoral thesis deals with a fabrication of thin NiTi films using a deposition on silicon substrates with two techniques - the magnetron sputtering and the pulsed-laser deposition (PLD), an investigation of their mi- crostructure using x-ray diffraction, a heat treatment of amorphous NiTi films and with a verification of MT using resistometry. Furthermore, thermomechan- ical properties of a system NiTi-polyimide (NiTi-PI), namely a dependence of a curvature radius of a NiTi-PI bilayer on temperature, are studied. 1

Identiferoai:union.ndltd.org:nusl.cz/oai:invenio.nusl.cz:353428
Date January 2016
CreatorsSvatuška, Michal
ContributorsVokoun, David, Dlouhý, Antonín, Novák, Pavel
Source SetsCzech ETDs
LanguageCzech
Detected LanguageEnglish
Typeinfo:eu-repo/semantics/doctoralThesis
Rightsinfo:eu-repo/semantics/restrictedAccess

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