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Wear characterization of polyurethane chemical mechanical polishing pads

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Identiferoai:union.ndltd.org:ucf.edu/oai:stars.library.ucf.edu:rtd-2267
Date01 July 2001
CreatorsMachinski, Susan R.
PublisherSTARS
Source SetsUniversity of Central Florida
LanguageEnglish
Detected LanguageEnglish
Typetext
SourceRetrospective Theses and Dissertations

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