Surface Acoustic Wave (SAW) devices are manufactured using standard metallization and photolithographic techniques that have been established by the semiconductor industry. The facilities in the newly developed Microelectronics laboratory at the University of Central Florida will be utilized in the fabrication of a SAW device.
This thesis will outline the complete procedure beginning with the initial design from given specifications, up to mask generation, fabricating and testing of the device. This will serve to calibrate the fabrication process for future work in SAW device and semiconductor fabrication.
The models that are used in the SAWCAD design software will be verified by comparing the theoretical and experimental results.
| Identifer | oai:union.ndltd.org:ucf.edu/oai:stars.library.ucf.edu:rtd-5704 |
| Date | 01 January 1984 |
| Creators | Yap, Raymond L. |
| Publisher | University of Central Florida |
| Source Sets | University of Central Florida |
| Language | English |
| Detected Language | English |
| Type | text |
| Format | application/pdf |
| Source | Retrospective Theses and Dissertations |
| Rights | Public Domain |
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