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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
1

Quantum Well Design and Electroabsorption Modulators Fabrication Based on the InGaAs/InAlAs material system

Lee, chin-Tang 06 July 2004 (has links)
The electroabsorption modulators (EAM) play an important role in the optoelectronic integrated circuits. InGaAs/InAlAs is an excellent material system for fabricating 1.55-£gm EA modulators. Natural high band-offset ( ) ratio structure and the strong exciton effect make this kind of material a good candidate for high saturation power operation and high speed. In order to design good quantum-well (QW) for electroabsorption, the Vegard¡¦s law is used to obtain the parameters of In1-x-yGaxAlyAs material by interpolating the relevant binary semiconductor material. The bowling factor is included in finding the right bandgap. Using the Resonant Scattering Method, the QW energy levels and electron-hole overlap integrals can be obtained to calculate the optical electroabsorption effects. In this thesis, the TWEAM based on In1-x-yGaxAlyAs material is also fabricated. In order to get low parasitic capacitance for high-speed operation, a processing called undercut-etching the active region is developed in this work. A selective etching solution (citric acid : H2O2) is used to etch InGaAs layers from InAlAs and the undercut-etching structure InGaAlAs EAM has been successfully fabricated. The processing includes 1)optical waveguide formation with wet etching; 2)n-contact evaporation and contact annealing; 3)mesa etch, PMGI passivation/bridging/planarization; 4)final metallization, cleaving line formation, wafer lapping and device cleaving.

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