プラズマ診断は，プラズマプロセス中の荷電粒子の役割を理解する上で重要である．しかしながら，一般的なプラズマ診断は低圧の場合に限られているため，大気圧プラズマの特性を把握するためには新たな診断技術の開発が必要である．本論文では，ゲルディエンコンデンサーを用いた大気圧プラズマ診断を提案し，実用上十分な性能を有すことを実証した内容について報告している．さらに測定に影響を及ぼす要因についても調査した. / Plasma diagnostics plays an important part in understanding the role of charged particles during plasma processes. However, since common plasma diagnostic techniques are limited to low-pressure case, there is a need for the development of a new diagnostic method specifically for atmospheric pressure plasma characterization. In this dissertation, a diagnostic technique based on the Gerdien condenser theory is developed for laboratory-produced atmospheric pressure plasma. The Gerdien condenser, which is a classical instrument employed in atmospheric science, is capable in measuring the ion mobility and density from an obtained current-voltage characteristic. The factors that can affect the measurements are also investigated. / 博士(工学) / Doctor of Philosophy in Engineering / 同志社大学 / Doshisha University