This paper presents a novel integration technique for segmented 3D profiles measured by projected fringe profilometry. Fringe patterns are projected to the inspected surface. The projected patterns fix their positions relative to the tested object during two segmented measurements. Thus, finding two matched surface points becomes a problem of searching for two identical phases in the fused data sets. This novel integration technique can match images successfully and achieve pixel-to-pixel registration easily even in the presence of geometric deformation, illumination changes, and severe occlusions. It is superior to the other methods because of its: (1) High matching accuracy; (2) Improved robustness; (3) Reduced computational time; (4) Capability of compensating distortions of the optical system at every pixel location; (5) Suitable for images rotating or scaling; and (6) Suitable for any other projected fringe measurement method. We also propose a method to design and fabricate a 2-D fringe pattern which can be applied to the integration technique for segmented 3D profiles. Campered with using 1-D fringe patterns for image registration, using a 2-D fringe pattern saves the measurement time and further proveds more tolerence to hand the shadow and noise problems. Tests of the system performance have been carried out that the accuracy of the registration scheme is 5.96% of image pixel size. Therefore, this technique can be extensively used in modern high technology industry. Especially when it requires higher resolution close-up images or overcomes the issue of not every inspected object can be fully expressed just by a single full-field measurement, it is necessary to use this integration technique.

A technique using diffractive elements for finding the absolute shape of a large-scale object is proposed. An accurate projected fringe profilometry can be built by applying the holographic technique in this system. The advantages of using the presented technique for projected fringe profilemetry are : (1) a large depth of field ; (2) very low fringe distortion ; (3) a compact design for the measurement system ; (4) high accuracy ; (5) fast measurement speed.

Abstract A projected fringe profilomertry ¡]PFP¡^ using a supercontinuum light illumination for micro-scale measurement is proposed. The supercontinuum light is generated by launching ultra short laser into a highly nonlinear photonic crystal fibers. The supercontinuum light with the following advantage¡G ¡]1¡^ Depth of the field is very large in the projected system. ¡]2¡^No speckle noise in the illumination system. Experiment results has shown that using supercontinuum light is superior to other illumination system This study indicates that the proposed measurement scheme could be applied to 3D shape measurements with large depth variation, especially for semi-conductor devices¡Bmicro electro-mechanical devices and biomedical species.