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The thesis aims to develop an ISFET chip compatible miniaturized planar reference. Such planar reference electrode will be constructed by: silica / silica oxide / titanium / palladium / silver / silver chloride / saturated KCl agar / silica nitride / silica. For the size of the reference electrode is only 10mm (length), 5mm (width) and 1mm (height), which is diminished of hundred-fold to the traditional reference electrode. In addition to develop the fabrication techniques of the electrodes, this thesis will be devoted to systematic measuring and analyzing their stability, AC impedence, cyclic voltammery and electrochemical noise characteristics. The results show that the stability is inside 1mV, offset voltage is about -9 mV and the resistance of AC impedence is 400