As the electronic products are getting more and more small, the trend of the needs for speed and accuracy is more precise. Therefore, upgrading the speed and the accuracy of contour error on tracking control has become an important point. This research is focus on the improving of contour error and terminus error. In the contour error, we design the acceleration /deceleration profile based on digital FIR filter. And then remodel the compensatory method of cross-coupled controller, making the design of controller parameter easier, and getting better efficiency. And further, we get the time-variable gain by curve of contour error, making the accuracy better. In terminus error, according to two-step control, we switch the controller in deceleration region, not only directly improving the terminus error, but also improving the contour error. Finally, the above improved strategies are verified by the simulation and experimental results.