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by Kwong-hon Lee. / Thesis (M.Phil.)--Chinese University of Hong Kong, 1993. / Includes bibliographical references (leaves [112-115]). / Chapter CHAPTER 1. --- INTRODUCTION / Chapter CHAPTER 2. --- PRINCIPLE OF ELLIPSOMETER / Chapter CHAPTER 3. --- MATHEMATICAL REPRESENTATION OF ELLIPSOMETRY / Chapter Section 3.1 --- Ambient Substrate / Chapter Section 3.2 --- Single Layer (Ambient-film substrate) / Chapter Section 3.3 --- Multilayer system (Isotropic Stratified planar structure) / Chapter CHAPTER 4. --- CLASSIFICATION OF ELLIPSOMETER / Chapter Section 4.1 --- Null-type Ellipsometer / Chapter Section 4.2 --- Photometric Ellipsometer / Chapter Section 4.3 --- Spectroscopic Ellipsometer / Chapter CHAPTER 5. --- CONSTRUCTION AND CALIBRATION OF THE SPECTROSCOPIC ELLIPSOMETER / Chapter Section 5.1 --- Design and construction / Chapter 5.1.1 --- Optical Assembly / Chapter 5.1.2 --- Electronic Circuit / Chapter 5.1.3 --- Micro-computer (Software) / Chapter 5.1.4 --- Modification of configuration / Chapter Section 5.2 --- Alignment and Calibration / Chapter 5.2.1 --- Alignment of Optical units / Chapter 5.2.2 --- Calibration of the system / Chapter 5.2.3 --- Measurements on standard samples / Chapter CHAPTER 6. --- ANALYSIS OF ELLIPSOMETRIC PARAMETERS / Chapter Section 6.1 --- Ambient-substrate model / Chapter Section 6.2 --- Ambient-layers model / Chapter 6.2.1 --- Parameter generator / Chapter 6.2.2 --- Least square fitting / Chapter 6.2.3 --- Choice of error function / Chapter CHAPTER 7. --- EXPERIMENTAL RESULT / Chapter Section 7.1 --- Spectra of Refractive index / Chapter 7.1.1 --- Low temperature MBE growth GaAs / Chapter 7.1.2 --- Amorphous Carbon / Chapter 7.1.3 --- High order x AlxGa1-xAs with different cooling rate / Chapter Section 7.2 --- Comparison of ellipsometric spectrum of SOI samples / Chapter 7.2.1 --- Difficulty in the analysis of multi-layer structure / Chapter 7.2.2 --- Silicon on insulator (SOI) / Chapter 7.2.2.1 --- The beam current effects / Chapter 7.2.2.2 --- Annealing after implantation / Chapter CHAPTER 8. --- CONCLUSION / Chapter Section8.1 --- Summary of the results / Chapter Section8.2 --- Suggestions for future work / REFERENCE / APPENDIX(A)MARQUART ALGORITHM / Chapter (B) --- CIRCUIT DIAGRAM

A.B. Macnee. / "December 16, 1948." / Bibliography: p. 42. / Army Signal Corps Contract No. W-36-039-sc-32037 Project No. 102B. Dept. of the Army Project No. 3-99-10-022.

A novel electrostatic analyzer (ESA) simulation method that differs significantly from traditional methods is presented in this study, the "reverse-fly" simulation method. The simulation process and its applications are discussed in detail. This method is tested by comparing its results to the published test data of three experimental instruments; The Proton Electrostatic Analyzer-High Geometric Factor (PESA-H) instrument on the Wind mission [Lin, et al. 1995], the 2π-Toroidal Analyzer (2πTA) of Young, et al., [1988], and the Hot Plasma Composition Analyzer (HPCA) to be used in the upcoming Magnetospheric Multi-scale (MMS) mission. The strong agreement between simulation and experimental results verifies the accuracy of this technique. Our results reveal detailed properties of ESA response that are not practical to assess using laboratory data. This simulation method then is used to compare the transmission characteristics of five published ESA geometries to efficiently determine the optimal ESA geometry for use in future space missions. We show that the simulation methods described here are an important contribution to instrument design and development techniques and are critical to efficient and accurate verification of instrument performance.

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Thesis (Ph. D.)--Michigan State University. Electrical Engineering, 2008. / Title from PDF t.p. (Proquest, viewed on Aug. 17, 2009) Includes bibliographical references (p. 120-135). Also issued in print.

Thesis (M.S.)--University of Texas at Dallas, 2008. / Includes vita. Includes bibliographical references (leaves 62-63)

Thesis (Ph. D.)--University of Washington, 1987. / Vita. Bibliography: leaves [106]-108.