<p dir="ltr">Gyroscopes have become an integral part of many application spaces ranging from consumer electronics to navigation. As navigation and movement tracking becomes necessary through inertial measurement units (that comprises gyroscopes and accelerometers) in myriad of scenarios especially when global navigation and satellite system (GNSS) is not available, stability of gyroscopes plays a detrimental role in the accuracy of navigation. Recent developments in micro-electromechanical systems (MEMS) based gyroscopes enabled them to penetrate into navigation grade application spaces. MEMS based miniaturization approach also revived the interest in nuclear magnetic resonance gyroscopes (NMRGs). In parallel, emerging atomic gyroscope technologies are getting attention such as using quantum defects in single crystal diamond. </p><p><br></p><p dir="ltr">Considering innovative ways MEMS can improve gyroscopes, we investigate solid state gyroscope technologies in piezoelectric MEMS and nuclear spin based platforms for next generation rotation sensing that is shock and vibration insensitive. For the first part of this study, we explore a piezoelectric resonator that can excite wine-glass mode (WGM) and tangential mode. WGM is used for rotation sensing applications in various excitation mechanisms in literature. However, we demonstrate the capability of exciting WGM without the need for segmented electrodes in piezoelectric domain that allows self-alignment of the excitation electrodes using a unique property of Lead Magnesium Niobate-Lead Titanate (PMN-PT). In the second part of the study, we explore Nitrogen-Vacancy (NV) centers in diamond to be used as gyroscopes exploiting the rotation sensitivity of nuclear spins. NV center-based gyroscopes provide solid-state solution with comparable or superior performance without any moving parts. We propose mechanical coupling to NV centers in diamond using piezoelectrically excited bulk acoustic waves (BAW) to extend the coherence time of nuclear spins by dynamical decoupling. We explore piezoelectric coupling design space of AlN thin film BAW resonators (FBARs) to enable efficient mechanical drive to improve Rabi oscillations in diamond to overcome one of the most important bottlenecks of realizing a gyroscope, which is the mitigation and control of nuclear spin and electron spin interaction in diamond NV center system.</p>

Ces travaux de thèse portent principalement sur la génération de signal d'horloge haute fréquence. Dans un premier temps, la faisabilité d'un oscillateur à base de BAW y est démontrée par la conception d'un circuit en technologie CMOS 65 nm. Les deux principales innovations sont les performances en terme de stabilité (bruit de phase de -128dBc/Hz à 100kHz de la porteuse) et en précision (implémentation d'une banque de capacités ayant un pas de 0.4ppm) de l'oscillateur. Sa consommation est optimisée (0.9mW). Il est suivi d'un diviseur faible bruit (-140dBc/Hz à 100kHz de la porteuse) délivrant un signal à 500MHz. Dans un second temps, les imperfections des résonateurs BAW sont analysées. Une procédure de calibration comprenant une calibration initiale et une calibration en boucle ouverte est alors proposée. Cette dernière repose sur l'identification et l'utilisation d'un modèle comportemental du dispositif, régulièrement mis à jour grâce à un filtre de Kalman. Une précision de 0.4 ppm est atteinte / This thesis deals with the gigahertz range reference frequency generation. In a first part, this document presents the design of a 500 MHz oscillator in a 65 nm CMOS process using a 2 GHz Bulk Acoustic Wave resonator. A digital frequency control is implemented using a switched capacitor bank in parallel to the resonator. The tuning range is up to 500 kHz with a minimum step of 200 Hz. The oscillator core uses a differential topology and is designed for low phase noise (-128 dBc/Hz at 100 kHz offset) at low power consumption (0.9 mW). It is followed by a low noise divider which provides a 500 MHz output with a phase noise of -139 dBc/Hz at 100 kHz offset from the carrier. In a second part, we consider a method for the calibration of a BAW based frequency reference. In fact, the frequency variations of a BAW oscillator against process, supply, temperature and aging effects make difficult its use as a frequency reference. We propose here a method based on Kalman filtering to identify with high precision a behavioral model of this BAW reference, thus enabling its use in an open loop frequency tuning. A precision of 0.4 ppm is achieved

Nous avons caractérisé différents cristaux piézoélectriques de Langatate La3Ga5.5Ta0.5O14 (LGT), de différentes couleurs afin d’évaluer l’influence des défauts sur la qualité de dispositifs du domaine Temps-Fréquence (résonateurs acoustiques).Nous avons étudié la composition de ces cristaux dont les variations autour de la composition stoechiométrique sont surtout dues à l’évaporation du Ga2O au cours de la croissance compensée par un excès de Ga2O3 dans le mélange initial. Pour déterminer cette composition, la technique ICP-AES, précédée par une mise en solution par fusion alcaline, est la plus fiable.La présence d’impuretés chimiques, telles que les éléments métalliques ou les terres rares, liée à la pureté des oxydes de base, au frittage de la charge dans un creuset alumine… est étudiée. Nous expliquons ainsi la nature des centres colorés qui évolue selon l’atmosphère de tirage ou lors d’un recuit particulier.C’est ainsi que nous avons déterminé certaines propriétés de LGT permettant l’obtention de dispositifs comme les résonateurs à ondes de volume dont le produit Q.f est supérieur à celui des résonateurs à quartz. Pour cela, nous montrons notamment qu’il est nécessaire que :- la composition du cristal soit la plus proche possible de la stoechiométrie,- la résistivité électrique soit la plus grande possible,- l’étude spectroscopique ne révèle aucune absorption dans le domaine du visible.Dans ces conditions, le facteur de qualité Q d’une résonance à 10 MHz peut être de 1.44 million au point d’inversion de la courbe fréquence-température (1.35 pour le quartz) mais qu’il diminue notablement pour atteindre 0.35 million si nous pratiquons un recuit sous air à 1000°C pendant 48 h. / We have characterized Langatate piezoelectric crystals La3Ga5.5Ta0.5O14 (LGT), differently colored in order to evaluate the defects influence on the quality of Bulk Acoustic Waves resonators for the Time and Frequency domain.We have analyzed the composition of crystals whose variations around stoichiometric composition are mainly due to the evaporation of the Ga2O during growth compensated by adding an excess of Ga2O3 in the initial mixture. Among different techniques, the ICP-AES spectrometry, preceded by a dissolution by alkaline fusion seems to be the most accurate technique to determine the composition.The inevitable presence of chemical impurities, such as metallic elements, rare earth… linked to the purities of the raw materials, to the sintering of the load in an alumina crucible… is also studied. We try to explain in particular the nature of the color centers that evolve according to the growth atmosphere or during a particular annealing.So, we conclude by a list of necessary properties to obtain BAW resonators exhibiting a Q.f product higher than quartz. For this, we establish that it is necessary that:- the crystal composition is as close as possible to the stoichiometric composition,- the electrical resistivity is the highest possible,- the spectroscopic study does not reveal any absorption band in the visible domain.In these conditions, we were able to highlight that the quality factor of a 10 MHz resonance is of 1.44 million at the inversion temperature of the frequency-temperature curve (1.35 for the quartz crystal in the same conditions), but that this one decreases significantly to reach 0.35 million if we perform an annealing under air at 1000 °C during 48 hours.