A BCB Polymer/Ta2O5/SiO2 antiresonant reflecting optical waveguide (ARROW) at quasi-antiresonant condition is presented. The waveguide consists of the SiO2 second cladding, the Ta2O5 first cladding, and the BCB core. The lateral guiding of the ARROW waveguide was formed by reactive ion etching based on SF6 and O2 mixtures (SF6 : O2 =1.5 : 1). A metal layer Ni/Cr thin films were used as the etch mask to avoid cracking of the mask caused by large thermal expansion coefficient of the BCB Polymer. The waveguide losses were measured by the cut back method. Large dry-etching aspect ratio of the BCB polymer to the etch mask was obtained. For TE polarized light, the propagation loss of the waveguide was 1.12 dB/cm at 1.3£gm. The propagation loss for TM polarized light was 2.56 dB/cm.