NDLTD Global ETD Search
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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

Search results

Showing 51 to 60 of 552 (0.024 seconds)
51

Cost analysis on the use of chamber cleaning agents nitrogen trifluoride and chlorine trifluoride in the semiconductor industry

Emmerich, Jodi. January 1999 (has links) (PDF)
Thesis, PlanB (M.S.)--University of Wisconsin--Stout, 1999. / Includes bibliographical references.
52

Surface investigations of the atomic layer growth mechanism in aluminum nitride thin film deposition using dimethylethylamine alane and ammonia /

Kuo, Jason Se-Yung. January 1999 (has links)
Thesis (Ph. D.)--University of Washington, 1999. / Vita. Includes bibliographical references (leaves [103]-112).
53

Simultaneous approach to model building and process design using experimental design application to chemical vapor deposition /

Wissmann, Paul J.. January 2008 (has links)
Thesis (Ph.D)--Chemical Engineering, Georgia Institute of Technology, 2009. / Committee Chair: Grover, Martha; Committee Member: Garmestani, Hamid; Committee Member: Hess, Dennis; Committee Member: McDowell, David; Committee Member: Nenes, Athanasios; Committee Member: Realff, Matthew. Part of the SMARTech Electronic Thesis and Dissertation Collection.
54

Mechanistic, surface chemistry, and growth studies of novel precursors for aluminum nitride thin films /

Robinson, David Walter. January 1999 (has links)
Thesis (Ph. D.)--University of Washington, 1999. / Vita. Includes bibliographical references (leaves 167-187).
55

The use of plasma-generated silicon dioxide-like coatings as charge storage media for electrets /

Lin, Xiaorong. January 1993 (has links)
Thesis (M.S.)--Rochester Institute of Technology, 1993. / Typescript. Includes bibliographical references (leaves 79-80).
56

Synthesis, structure, and reactivity of some heavier main group compounds /

McBurnett, Brian Gordon, January 1998 (has links)
Thesis (Ph. D.)--University of Texas at Austin, 1998. / Vita. Includes bibliographical references. Available also in a digital version from Dissertation Abstracts.
57

Deposition of gate quality dielectrics for Si/Si-Ge heterostructure devices using remote plasma chemical vapor deposition /

Sharma, Rajan, January 1999 (has links)
Thesis (Ph. D.)--University of Texas at Austin, 1999. / Vita. Includes bibliographical references (leaves 140-145). Available also in a digital version from Dissertation Abstracts.
58

Fabrication and characterization of MOCVD grown AIInAs/GaInAs high electron mobility transistors /

Ng, Kai Lun. January 2010 (has links)
Includes bibliographical references (p. 46-51).
59

SiC Growth by Laser CVD and Process Analysis

Mi, Jian. January 2006 (has links)
Thesis (Ph. D.)--Mechanical Engineering, Georgia Institute of Technology, 2006. / Lackey, W. Jack, Committee Chair ; Cochran, Joe K., Committee Member ; Danyluk, Steven, Committee Member ; Fedorov, Andrei G., Committee Member ; Rosen, David W., Committee Member ; Wang, Zhonglin, Committee Member.
60

Nitrogen incorporation in nanodiamond deposition

Tsui, Kin Chung. January 2005 (has links) (PDF)
Thesis (M.Sc.)--City University of Hong Kong, 2005. / At head of title: City University of Hong Kong, Department of Physics and Materials Science, Master of Science in materials engineering & nanotechnology dissertation. Title from title screen (viewed on Sept. 4, 2006) Includes bibliographical references.

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