An adapted capacitance manometer is a sensor composed of one fixed plate and one movable plate that is able to make accurate pressure measurements in a low pressure environment. Using detection circuitry, a change in capacitance between the two plates can be measured and correlated to a differential pressure. First, a high sensitivity manometer is produced that exhibits a measurable change in capacitance when experiencing a pressure differential in a low pressure space environment. Second, an accurate and precise detection circuit is identified to measure the change in capacitance. Both, the manometer and the detection circuitry, are tested separately and together to confirm accurate measurements when experiencing small pressure differentials. The manometer shows low sensitivity at the desired differential pressure range but reacts predictably when compared to simulations. The manometer also shows an unexpected correlation in capacitance change to temperature change. / Master of Science

Capacitance manometer with sensors maintained at temperatures above the temperature of the vacuum vessel may read a higher gas pressure than the true value. This arises due to a transport process of molecules induced by molecule-surface collisions called thermal transpiration effect. Thermal transpiration effect depends on the pressure, the temperature gradient, gas, geometry and surface properties of the interconnecting pipe between the capacitance manometer and the vacuum vessel. To determine the height of the thermal transpiration effect for the biomolecular gas tetrahydrofuran, an experimental setup has been built. Its suitability to measure the thermal transpiration effect has been tested. Measurements of thermal transpiration effects for nitrogen and tetrahydrofuran have been analyzed with the semi-empirical Takaishi-Sensui equation. The coefficients of the Takaishi-Sensui equation can be used to determine the magnitude of the thermal transpiration effect for different temperature gradients, diameters of the interconnecting pipe and pressures.