Zinc Oxide (ZnO)is a wide band gap semiconductor which has attracted great attention because of its wide applicability. In order to obtain semiconductor devices with stable and reproducible properties further study of deep level defects is essential. DLTS (Deep level Transient Spectroscopy) is a direct and straightforward techniqueto determine the energy level of the deep level defects. Other information such as activation energy and capture cross section of the defect can also be obtained through this method. In our study ZnO single crystal samples were implanted by oxygen with the energy of 150keV. After the pretreatment of hydrogen peroxide, Schottky contacts were fabricated with Au film deposited by thermal evaporation. Deep level defects were studied by deep level transient spectroscopy (DLTS). Single peak spectra were observed in the as-implanted sample and samples anneal at 350oC, 650oC and 750oC with the corresponding activation energy decreasing with the annealing temperature from ~0.29eV as found in theas-implanted sample. Three peaks were identified in the DLTS spectra of the 900oC sample, with the activation energies of 0.11eV, 0.16eV and 0.37eV respectively.After analysis in detail we found some peaks in the DLTS spectra were the combination of two other peaks, dominated in different temperature range. The thermal evolutions of the deep levels up to the temperature of 1200oC were also investigated. / published_or_final_version / Physics / Master / Master of Philosophy

published_or_final_version / Physics / Master / Master of Philosophy

Thesis (M.S.)--Texas State University-San Marcos, 2008. / Vita. Appendices: leaves 132 -234. Includes bibliographical references (leaves 235-236). Also available on microfilm.

Thesis (M. Phil.)--University of Hong Kong, 2008. / Includes bibliographical references (leaf 68-75) Also available in print.

Thesis (Ph.D.(Physics))--University of Pretoria, 2009. / Includes abstract in English. Includes bibliographical references. Also available online.

Thesis (Ph.D.)(Physics)--University of Pretoria, 2006. / Includes summary. Includes bibliographical references. Available on the Internet via the World Wide Web.

published_or_final_version / Physics / Master / Master of Philosophy

published_or_final_version / abstract / Physics / Doctoral / Doctor of Philosophy

A primarily software based Fourier Deep Level Transient Spectroscope (FDLTS) is built. The raw capacitance transient is acquired and digitized using capacitance meter HP4280A whereas the signal analysis is done using a customized software module. The software module calculates both the conventional DLTS spectrum and the Fourier DLTS spectrum. This home-made FDLTS set up was compared to a commercial conventional box-car DLTS system (Sula Technology's DLTS) as well as to a commercial Fourier DLTS system (Bio-rad) and it was found to be either equivalent to the commercial systems or even better in some respects. In one case, Fourier analysis using the home-made setup, led to the detection of a trap completely undetected by the commercial conventional DLTS. The FDLTS system together with the commercial conventional DLTS were used to study possible gold contamination in an industrial process. The study was accomplished by comparing conventional and Fourier DLTS spectra and corresponding calculated trap properties using Schottky barrier diodes fabricated on the suspect wafers and an intentionally gold diffused reference sample wafer. During the investigation minority carrier emission in DLTS using Schottky barrier diodes was observed. The study revealed the presence of some possible gold-like contamination which trapped minority carriers (i.e. electrons) in p type silicon. / Graduation date: 2003

Thesis (Ph. D.)--Ohio State University, 2006. / Title from first page of PDF file. Includes bibliographical references (p. 232-237).