Thesis (M.S.)--West Virginia University, 1999. / Title from document title page. Document formatted into pages; contains ix, 102 p. : ill. (some col.) Includes abstract. Includes bibliographical references (p. 78-83).

by Tse Pak Kan. / Thesis (M.Phil.)--Chinese University of Hong Kong, 1999. / Includes bibliographical references. / Text in English; abstracts in English and Chinese. / by Tse Pak Kan. / ABSTRACT --- p.i / 摘要 --- p.iii / ACKNOWLEDGEMENTS --- p.iv / TABLE OF CONTENTS --- p.v / LIST OF FIGURES --- p.xi / LIST OF TABLES --- p.xiii / Chapter CHAPTER 1 --- DIAMOND AND DIAMOND-LIKE CARBON FILMS - BACKGROUND --- p.1 / Chapter 1.1 --- Introduction --- p.1 / Chapter 1.2 --- Properties of diamond and diamond like carbon --- p.1 / Chapter 1.2.1 --- Nature of diamond film --- p.1 / Chapter 1.2.2 --- Nature of diamond-like carbon films --- p.3 / Chapter 1.2.2.1 --- Diamond-Like Carbon Films --- p.6 / Chapter 1.2.2.2 --- Diamond-Like Hydrocarbon Films --- p.7 / Chapter 1.3 --- Application of diamond films --- p.8 / Chapter 1.4 --- Application of diamond-like carbon films --- p.9 / References for Chapter1 --- p.11 / Chapter CHAPTER 2 --- BACKGROUND OF THE STUDY --- p.12 / Chapter 2.1 --- Introduction --- p.12 / Chapter 2.2 --- Chemical Vapor Deposition --- p.15 / Chapter 2.2.1 --- CVD techniques --- p.17 / Chapter 2.2.2 --- Drawback of CVD techniques --- p.17 / Chapter 2.3 --- Ion beam Deposition --- p.18 / Chapter 2.3.1 --- Ion beam deposition techniques --- p.18 / Chapter 2.3.2 --- Literature review of ion beam deposition of diamond films --- p.19 / Chapter 2.3.2.1 --- Homoepitaxy of diamond films --- p.20 / Chapter 2.3.2.2 --- Heteroepitaxy of diamond films --- p.21 / Chapter 2.4 --- Objective of the present study --- p.23 / References for Chapter2 --- p.25 / Chapter CHAPTER 3 --- INSTRUMENTATION --- p.27 / Chapter 3.1 --- Introduction --- p.27 / Chapter 3.2 --- Low energy ion beam deposition system (LEIBS) --- p.27 / Chapter 3.2.1 --- Introduction --- p.27 / Chapter 3.2.2 --- Theory --- p.28 / Chapter 3.2.3 --- System Operations --- p.29 / Chapter 3.2.3.1 --- Ion Source --- p.30 / Chapter 3.2.3.2 --- Electrostatic Einzel Focusing Lens --- p.33 / Chapter 3.2.3.3 --- Auxiliary hot electron emitter --- p.33 / Chapter 3.2.3.4 --- Substrate stage with a heater block --- p.35 / Chapter 3.3 --- X-ray photoelectron spectroscopy (XPS) --- p.35 / Chapter 3.3.1 --- Background of XPS --- p.35 / Chapter 3.3.2 --- Theory --- p.35 / Chapter 3.3.3 --- Qualitative analysis --- p.39 / Chapter 3.3.3.1 --- Chemical Shift Peaks --- p.42 / Chapter 3.3.3.2 --- Auger Peaks --- p.43 / Chapter 3.3.3.3 --- Energy Loss Peaks --- p.43 / Chapter 3.3.4 --- Quantitative analysis --- p.44 / Chapter 3.3.4.1 --- Homogeneous system --- p.44 / Chapter 3.3.4.2 --- Layer Thickness Determination --- p.49 / Chapter 3.3.5 --- Instrumentation --- p.51 / Chapter 3.3.5.1 --- Monochromatized X-ray source --- p.53 / Chapter 3.3.6 --- Application to carbon films --- p.54 / Chapter 3.3.6.1 --- Compositional Analysis --- p.54 / Chapter 3.3.6.2 --- Angle-resolved analysis --- p.56 / Chapter 3.3.6.3 --- Energy Loss Structure --- p.58 / References for Chapter3 --- p.61 / Chapter CHAPTER 4 --- THE CHARACTERIZATION OF LOW ENERGY ION BEAM USING A COMPACT FARADAY CUP --- p.63 / Chapter 4.1 --- Introduction --- p.63 / Chapter 4.2 --- Design of the Faraday cup with retarding lens --- p.63 / Chapter 4.3 --- Parameters control of energy distribution of ion beam --- p.66 / Chapter 4.4 --- Basic operation of the retarding lens energy analyser --- p.67 / Chapter 4.5 --- Effect of cathode voltage on energy distribution --- p.68 / Chapter 4.6 --- Effect of anode voltage on energy distribution --- p.71 / Chapter 4.7 --- Effect of sample bias on energy distribution --- p.71 / Chapter 4.8 --- Conclusions --- p.71 / References for Chapter4 --- p.76 / Chapter CHAPTER 5 --- OPTICAL PROPERTIES OF DLC FILMS DEPOSITED --- p.77 / Chapter 5.1 --- Introduction --- p.77 / Chapter 5.2 --- Experimental Procedure --- p.78 / Chapter 5.2.1 --- Sample pretreatment --- p.78 / Chapter 5.2.2 --- Improvement of current density --- p.80 / Chapter 5.2.3 --- Improvement of charging effect --- p.80 / Chapter 5.2.4 --- Experimental Plan --- p.82 / Chapter 5.3 --- Determination of thickness and growth rate of DLC films by alpha-step instrument --- p.83 / Chapter 5.4 --- Determination of microstructures in DLC films by Raman spectroscopy --- p.86 / Chapter 5.5 --- Determination of sp3/sp2 ratios in DLC films by infrared spectroscopy --- p.91 / Chapter 5.6 --- Determination of band gap of DLC by ultraviolet-visible transmittance spectrum --- p.94 / Chapter 5.7 --- Conclusions --- p.97 / References for Chapter5 --- p.99 / Chapter CHAPTER 6 --- GROWTH OF DIAMOND AND DIAMOND-LIKE FILMS USING DIFFERENT ION ENERGIES --- p.100 / Chapter 6.1 --- Introduction --- p.100 / Chapter 6.2 --- Experimental Procedure --- p.100 / Chapter 6.2.1 --- Sample pretreatment --- p.100 / Chapter 6.2.2 --- Improvement of heating source --- p.100 / Chapter 6.2.3 --- Experimental Plan --- p.101 / Chapter 6.3 --- Characterization of carbon films using XPS --- p.102 / Chapter 6.4 --- XPS-EELS of carbon films under different ion beam energy --- p.102 / Chapter 6.5 --- Surface morphology of carbon films --- p.106 / Chapter 6.6 --- Mechanism proposed --- p.108 / Chapter 6.7 --- Conclusions --- p.109 / References for Chapter6 --- p.111 / Chapter CHAPTER 7 --- INVESIGATION OF ADHESION PROPERTIES OF PERFLUORINATED LUBRICANTS ON AMORPHOUS CARBON OR CARBON NITRIDE FILMS --- p.112 / Chapter 7.1 --- Introduction --- p.112 / Chapter 7.2 --- Experimental Procedure --- p.113 / Chapter 7.2.1 --- Description of perfluorinated lubricant used --- p.113 / Chapter 7.2.2 --- Determination of the composition of a-C:H or CNX layer --- p.116 / Chapter 7.2.3 --- Thickness calculation --- p.116 / Chapter 7.3 --- Characterization of PFPE film --- p.121 / Chapter 7.4 --- Effects of molecular weight of PFPE on lubricant adhesion --- p.125 / Chapter 7.5 --- Effects of hydrogen content on lubricant adhesion --- p.128 / Chapter 7.6 --- Effects of end groups of PFPE on lubricant adhesion --- p.128 / Chapter 7.7 --- Verification of film thickness --- p.129 / Chapter 7.8 --- Conclusions --- p.129 / References for Chapter7 --- p.131 / Chapter CHAPTER 8 --- CONCLUSIONS --- p.132

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