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Multiple thin films which are conducting, insulating and semiconducting are important components of integrated circuit technology. Circuits are fabricated from these layers by patterning the films to form isolated circuit elements which are themselves interconnected by patterned films (1).

Resonance structures have long been employed by RF and microwave devices ranging from antennas, to wave guides. These resonance structures have exhibited an enormous amount of control over the wavelength selectivity, polarization, and directivity of the electromagnetic radiation which couples to the structure. Traditional geometrical optics has alternatively used discrete optical components such as lenses, gratings, and polarizers to accomplish equivalent control over optical radiation. This dissertation contributes to the larger body of literature that applies lessons learned in RF and microwave resonance structures, to nanoscale resonance structures. Optoelectronic nanoscale resonance structures were fabricated and characterized using both experimental and numerical methods. Two nanoscale resonance structures were investigated: an antenna inspired Yagi-Uda array, and a metasurface inspired interdigitated structure. Experimental devices containing the nanoscale resonance structures were fabricated on semiconducting substrates forming metal-semiconductor-metal photodiodes. The spectral response of the nanoscale resonance photodiode was determined by measuring the photocurrent or photovoltage resulting from incident monochromatic light which was swept through wavelengths from 400 nm to 2000 nm. The previously mentioned Yagi-Uda based device exhibited two maxima in photoresponse at 1110 nm and 1690 nm. Effective wavelength scaling was applied to the Yagi-Uda nanoantenas, and consistency was demonstrated between the theoretical effective wavelength and experimental photoresponse maxima. The spectral response of the interdigitated structure demonstrated good qualitative agreement with the finite element modeled absorbance in an equivalent structure. Analysis of the modeled absorbance suggests that hot electron injection contributes to the photoresponse, and the spectral response of the detector device may be tuned by varying the geometrical parameters of the device. An optimized device was proposed that could improve photodetection efficiency using nanoscale resonance devices. Antenna inspired nanoscale resonance structures may be used to probe fundamental physical phenomena such as hot carrier generation, hot carrier transport, and surface plasmon resonances. Combined optical and electrical-optoelectronic devices exploiting these phenomena may be realized for a variety of applications, eliminating some or all of the discrete optical components required for optoelectronic systems and hence significantly reducing the SWaP cost of optoelectronic systems. / Doctor of Philosophy / Resonance structures have long been employed by RF and microwave devices ranging from antennas, to wave guides. These resonance structures have exhibited an enormous amount of control over radio waves. Traditional optics has alternatively used discrete components such as lenses, gratings, and polarizers to accomplish equivalent control over light waves. This dissertation contributes to the larger body of literature that applies lessons learned in RF and microwave resonance structures, to nanoscale resonance structures. Optoelectronic nanoscale resonance structures were fabricated and characterized using both experimental and computational methods. Two nanoscale resonance structures were investigated: an antenna inspired Yagi-Uda array, and a metasurface inspired interdigitated structure. The ability of both devices to detect light of a particular wavelength was then tested. The photoresponse of the device containing a Yagi-Uda array is consistent with RF Yagi-Uda antennas when considered in accordance with the concept of effective wavelength. The experimental response of the interdigitated structure demonstrated good qualitative agreement with the computational modeled absorbance in an equivalent structure. Analysis of the modeled absorbance suggests that the spectral response of the detector device may be tuned by varying the geometrical parameters of the device. An optimized device was proposed that could improve photodetection efficiency using nanoscale resonance devices. Antenna inspired nanoscale resonance structures may be used to probe fundamental physical phenomena such as hot carrier generation, hot carrier transport, and surface plasmon resonances. Combined optical and electrical-optoelectronic devices exploiting these phenomena may be realized for a variety of applications, eliminating some or all of the discrete optical components required for optoelectronic systems and hence significantly reducing the SWaP cost of optoelectronic systems.

Various techniques to synthesize nanowires and nanotubes as a function of growth temperature and time were investigated. These include growth of nanowires by a chemical vapor deposition (CVD) system using vapor-liquid-solid (VLS) growth mechanism and electro-chemical synthesis of nanowires and nanotubes. Narrow band gap InSb Eg = 0.17 eV at room temp) nanowires were successively synthesized. Using a phase diagram, the transition of the nanowire from metallic- semiconducting- semi-metallic phase was investigated. A thermodynamic model is developed to show that the occurrence of native defects in InSb nanowires influenced by the nanowire growth kinetics and thermodynamics of defect formation. Wide band gap ZnO (Eg = 3.34 eV) and In2O3 (3.7 eV) were also synthesized. ZnO nanowires and nanotubes were successfully doped with a transition metal Fe, making it a Dilute Magnetic Semiconductor of great technological relevance. Structural and electronic characterizations of nanowires were studied for different semiconducting, metallic and semi-metallic nanowires. Electron transport measurements were used to estimate intrinsic material parameters like carrier concentration and mobility. An efficient gas sensing device using a single In2O3 nanowire was studied and which showed sensitivity to reducing gas like NH3 and oxidizing gas like O2 gas at room temperature. The efficiency of the gas sensing device was found to be sensitive to the nature of contacts as well as the presence of surface states on the nanowire.

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