Algorithms and simulators comprised of SPICE3 as a circuit level simulator and two device simulators EOFLOW and PROPHET for accurate simulation of new types of devices are presented in this thesis. An integration of EOFLOW with SPICE3 creates a capability for efficient simulation of a system containing interconnected electroosmotic flow channels together with control electronics. Using this simulator, an accurate simulation of a complex interconnection of channels has been performed. In addition, various flow control schemes have been evaluated for their effectiveness. Coupling of PROPHET and SPTCE3 allows for the simulation of accurate semiconductor device models. This capability is necessary for critical RF and analog applications. The coupled SPICE3-HB-PROPHET simulator incorporates the harmonic balance algorithm for large-signal frequency domain analysis. Applications of this analysis are demonstrated in the noise coupling between devices sharing the same silicon substrate. / Graduation date: 2003