In this study, for elimination the bias of accounting traditional policy resulted, I use economic value added (EVA) to analyze the performance of Taiwan semiconductor industry. Its findings are as follows: 1.Taiwan semiconductor industry's operating performance is vloatile, the standard deviation of EVA-Spread is more than 14% for years, inter-firm difference in performance is becoming increasingly, and less of 50% of companies is worth to invest. 2.The reason of EVA-Spread performance influence as WACC, mainly be influenced by bank interest rates and industry capital structure changes. And the factors affect ROIC, including the global demand for semiconductor and the real GDP growth rate of Taiwan, Hong Kong, Japan and Singapore, but not related with China¡¦s real GDP growth rate. 3.In Sub-industries, IC design industry is the best performance and steady, but there is obviously different in inter-firm; semiconductor equipment industry has the worst performance and negative EVA-Spread in recent 7-years. IC manufacturing without DRAM has nice performce in recent 5 years and more and more stable. In the orher hand, DRAM industry has performed poorly. That means that corporations have obvious effect on performance in various sub-industries. 4.Focus on the stability of sub-industries performance, the IC design industry has minimum volatility, secondary is lead-frame, photomask and IC packaging and testing industries. And the maximum volatility is DRAM industry and then is DRAM module and semiconductor equipment industry. On the growth, IC packaging and testing, wafer material, manufacturing without DRAM and substrate industries are steady growing industries. Although lead-frame industry is a kind of slow-growing industry, but its EVA-Spreads are minus. Other, flash module and photomask industries are declining industries. 5.Focus on the investing behavior and value creation capcity, when IC packaging and testing, substrate, wafer material and photomask industries increasing their capital, would be helpful to increase EVA-Spread; and it would not be helpful on semiconductor equipment, flash module and IC design industries. 6.It is related with the sub-industries of IC design, substrate, packaging and testing, wafer material, discrete devices, DRAM and flash industries, and IC manufacturing industry without DRAM. It implied that these 7 sub-industries affected by the semiconductor business. It is not related with the sub-industries of semiconductor equipment, DRAM module, lead-frame, photomask and other industries, and the IC manufacturing without DRAM. It implied that these 5 Sub-industries deeply affected by other factors.