Zugl.: Stuttgart, Univ., Diss., 2003.

Zugl.: Stuttgart, Univ., Diss., 2004.

The paper treats the question of feasibility of measuring intrinsic thin film stresses due to nanoindentation. A variety of different methods is proposed and analysed with respect to their applicability. As this accuracy-estimation results in boundary conditions for the measurements which can not be fulfilled yet, the whole topic is considered from a purely academic point of few. With the help of a special software package [25] the following methods are considered: 1. Taking the moment of beginning plastic flow within the substrate as indictor, 2. Taking the moment of beginning plastic flow within the film as indictor, 3. Applying mixed loads (normal and lateral forces), 4. Applying the concept of the effectively shaped indenter. While the methods 2 to 4 appear to be in principle feasible, method 1 can completely be ruled out as being of no practical use. The mentioned software package (FilmDoctor prototype) is part of the supplemental material of this study.

The paper treats the question of feasibility of measuring intrinsic thin film stresses due to nanoindentation. A variety of different methods is proposed and analysed with respect to their applicability. As this accuracy-estimation results in boundary conditions for the measurements which can not be fulfilled yet, the whole topic is considered from a purely academic point of few. With the help of a special software package [25] the following methods are considered: 1. Taking the moment of beginning plastic flow within the substrate as indictor, 2. Taking the moment of beginning plastic flow within the film as indictor, 3. Applying mixed loads (normal and lateral forces), 4. Applying the concept of the effectively shaped indenter. While the methods 2 to 4 appear to be in principle feasible, method 1 can completely be ruled out as being of no practical use. The mentioned software package (FilmDoctor prototype) is part of the supplemental material of this study.