This thesis work is about further developing an existing capacitive MEMS sensor for in situ TEM nanoindentation developed by Nanofactory Instrument AB. Today, this sensor uses a parallel plate capacitor suspended by springs to measure the applied force. The forces are in the micro Newton range. One major issue using with this measurement technique is that the tip mounted on one of the sensor plates can move out of the TEM image when a force is applied. In order to improve the measurement technique electrostatic feedback has been investigated. The sensor’s electrostatic properties have been evaluated using Capacitance-Voltage measurements and a white light interferometer has been used to directly measure the displacement of the sensor with varying voltage. Investigation of the sensor is described with analytical models with detailed treatment of the capacitive response as function of electrostatic actuation. The model has been tested and refined by using experimental data. The model showed the existence of a serial capacitor in the sensor. Moreover, a feedback loop was tested, by using small beads as load and by manually adjusting the voltage. With the success of controlling the feedback loop manually, it is shown that the idea is feasible, but some modifications and improvements are needed to perform it more smoothly.

<p>This thesis work is about further developing an existing capacitive MEMS sensor for in situ TEM nanoindentation developed by Nanofactory Instrument AB. Today, this sensor uses a parallel plate capacitor suspended by springs to measure the applied force. The forces are in the micro Newton range. One major issue using with this measurement technique is that the tip mounted on one of the sensor plates can move out of the TEM image when a force is applied. In order to improve the measurement technique electrostatic feedback has been investigated. The sensor’s electrostatic properties have been evaluated using Capacitance-Voltage measurements and a white light interferometer has been used to directly measure the displacement of the sensor with varying voltage. Investigation of the sensor is described with analytical models with detailed treatment of the capacitive response as function of electrostatic actuation. The model has been tested and refined by using experimental data. The model showed the existence of a serial capacitor in the sensor. Moreover, a feedback loop was tested, by using small beads as load and by manually adjusting the voltage. With the success of controlling the feedback loop manually, it is shown that the idea is feasible, but some modifications and improvements are needed to perform it more smoothly.</p>