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High density and high reliability thin film embedded capacitors on organic and silicon substratesKumar, Manish. January 2008 (has links)
Thesis (M.S.)--Materials Science and Engineering, Georgia Institute of Technology, 2009. / Committee Chair: Tummala Rao; Committee Member: Pulugurtha Raj; Committee Member: Wong C P. Part of the SMARTech Electronic Thesis and Dissertation Collection.
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