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Part I - We have designed a binary metallic alloy for nanoscale resonator applications. We used magnetron sputtering to deposit films with different stoichiometries of aluminum and molybdenum and then characterized the microstructure and physical properties of each film. A structure zone map is proposed to describe the dependence of surface and bulk structure on composition. We then fabricated proof of principle resonators from the Al-32 at%Mo composition, selected for its optimized physical properties. An optical interferometer was used to characterize the frequency response of our resonators. Part II - We investigate the growth of faceted polycrystalline thin films with modeling and simulations. A new analytic model is derived for the case of orientation dependent facet growth velocity and the dependence of growth on initial grain orientations is explicitly calculated. Level set simulations were used to both confirm this analytic model and extend it to include various angular flux distributions, corresponding to different deposition methods. From these simulations, the effects of self-shadowing on polycrystalline film growth are quantitatively evaluated. / Materials Engineering

Layer-by-layer (LbL) assembly has proven to be a powerful technique for assembling thin films with a variety of properties including electrochromic, molecular sensing, oxygen barrier, and antimicrobial. LbL involves the deposition of alternating cationic and anionic ingredients from solution, utilizing the electrostatic charges to develop multilayer films. The present work incorporates cationic antimicrobial agents into the positively-charged layers of LbL assemblies. When these thin films are exposed to a humid environment, the antimicrobial molecules readily diffuse out and prevent bacterial growth. The influence of exposure time, testing temperature, secondary ingredients and number of bilayers on antimicrobial efficacy is evaluated here. Additionally, film growth and microstructure are analyzed to better understand the behavior of these films. The antimicrobial used here is a positively-charged quaternary ammonium molecule (e.g. cetyltrimethylammonium bromide [CTAB]) that allow assemblies to be made with or without an additional polycation like polydiallyldimethylamine. While films without this additional polymer are effective, they do not have the longevity or uniformity of films prepared with its addition. All of the recipes studied show linear growth as a function of the number of bilayers deposited and this growth is relatively thick (i.e. > 100 nm per bilayer). In general, 10-bilayer films prepared with CTAB and poly(acrylic acid) are able to achieve a 2.3 mm zone of inhibition against S. aureus bacteria and 1.3 mm against E. coli when test are conducted at body temperature (i.e. 37oC). Fewer bilayers reduces efficacy, but lower test temperatures improve zones of inhibition. As long as they are stored in a dry atmosphere, antimicrobial efficacy was found to persist even when films were used four weeks after being prepared. The best films remain effective (i.e. antimicrobially active) for 4-6 days of constant exposure to bacteria-swabbed plates. This technology holds promise for use in transparent wound bandages and temporary surface sterilization.

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Ag thin and thick films have been experimentally deposited using a technique called Laser Ablation of a Microparticle Aerosol (LAMA). This technique is based on a supersonic jet accelerating NPs of a few nm diameter up to 1000 m/s and operating at room temperature. The deposited films have experimentally demonstrated interesting properties such as dense growth with good adherence on the substrate. Aerosol feed rates have been fixed to 10 mg/h which corresponds to rate depositions of 10¹⁰ to 10¹¹ NPs/s/cm². In order to model this deposition technique and possibly be able to predict the morphology and structure of deposited films using computational methods, we have designed MD programs simulating the depositions of several Ag nanoclusters onto a substrate at a fixed temperature (300 K). The variation of parameters such as cluster size, cluster impact energy, and deposition rate has influenced the morphology and structure of the deposited films. Cluster diameters have been set to 3 nm or 5 nm, cluster velocities set to 200 m/s (0.022 eV/atom), 400 m/s (0.069 eV/ atom), or 800 m/s (0.358 eV/atom), and the deposition rate adjusted to ensure relaxation times between impactions of 5 ps to 20 ps. The evolution of deposited film density, adherence, and crystal arrangement has been analyzed with the variation of the aforementioned parameters. The highest cluster velocities have enabled the deposition of smoother, denser, and more adherent films. NCs with an initial velocity of 200 m/s have shown ratios of flattening equal to 50 % as opposed to 85% flattening for NCs deposited at 800 m/s. These observations have enabled us to draw qualitative conclusions on the film density The deposited films are less porous when the cluster impaction velocity increases. Atomic mixing between substrate and impacted NC atoms increased with increasing deposition velocity, which can perhaps be correlated to an increase of adherence, assuming that more mixing will create stronger molecular binding in the cluster-substrate interaction. Finally, complete epitaxial growth was observed for the highest impaction velocities only, which indicates that recrystalization can occur for this range of impact energies (0.3 eV/atom - 0.5 eV/atom). Although experimental results have given more quantitative data on film density and sticking ratios, they agree with our modeling, and this comparison allows us to validate our MD simulations. However, some limitations have been faced, mainly because of long computing time requirements that a single laptop computer has not been able to support. / text