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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.
1

An Electromagnetic Actuated Microvalve Fabricated on a Single Wafer

Sutanto Bintoro, Jemmy 23 November 2004 (has links)
Microvalves are essential components of the miniaturization of the fluidic systems to control of fluid flow in a variety of applications as diverse as chemical analysis systems, micro-fuel cells, and integrated fluidic channel arrangements for electronic cooling. Using microvalves, these systems offer important advantages: they can operate using small sample volumes and provide rapid response time. This PhD dissertation presents the world first electromagnetically actuated microvalve fabricated on a single wafer with CMOS compatibility. In this dissertation, the design, fabrication, and testing results of two different types of electromagnetic microvalves are presented: the on/off microvalve and the bistable microvalve with latching mechanism. The microvalves operate with power consumption of less than 1.5 W and can control the volume flow rate of DI water, or a 50% diluted methanol solution in the range 1 - 50 µL in. The leaking rate of the on/off microvalve is the order of 30 nL/min. The microvalve demonstrated a response time for latching of 10 ms in water and 0.2 ms in air. This work has resulted in a US patent, application no. 10/699,210.Other inventions that have been developed as a result of this research are bidirectional, and bistable-bidirectional microactuators with latching mechanism, that can be utilized for optical switch, RF relay, micro mirror, nano indenter, or nano printings.

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