by Lee, Chun-Sing. / Thesis (M.Phil.)--Chinese University of Hong Kong, 1999. / Includes bibliographical references (leaves 98-105). / Abstracts in English and Chinese. / Acknowledgements --- p.2 / Abstract --- p.3 / Table of Contents --- p.7 / List of Figures --- p.10 / List of Tables --- p.13 / Chapter Chapter 1 --- Introduction --- p.14 / Chapter 1.1. --- Ion implantation --- p.14 / Chapter 1.2. --- Scope of the thesis --- p.15 / Chapter Chapter 2 --- Background Theory --- p.17 / Chapter 2.1. --- Ion stopping --- p.17 / Chapter 2.2. --- The energy-loss process --- p.17 / Chapter 2.3. --- Kinematics of binary elastic collision --- p.20 / Chapter 2.4. --- Nuclear and electronic stopping --- p.21 / Chapter 2.5. --- Radiation Damage --- p.22 / Chapter 2.6. --- Spikes --- p.24 / Chapter 2.7. --- Topography of ion bombarded surface --- p.26 / Chapter Chapter 3 --- Equipment Reviews --- p.31 / Chapter 3.1. --- Metal Vapour Vacuum Arc Ion Source Implanter --- p.31 / Chapter 3.2. --- Atomic Force Microscopy --- p.34 / Chapter 3.3. --- Rutherford Backscattering Spectrometry --- p.37 / Chapter 3.4. --- X-ray Diffraction --- p.40 / Chapter Chapter 4 --- Study of Ion Beam Implanted Germanium by Atomic Force Microscopy and Rutherford Backscattering Spectrometry --- p.43 / Chapter 4.1. --- Introduction --- p.43 / Chapter 4.2. --- Experiments --- p.45 / Chapter 4.3. --- Results and discussion --- p.47 / Chapter 4.3.1. --- AFM --- p.47 / Chapter 4.3.2. --- RBS and ion channeling --- p.64 / Chapter 4.4. --- Conclusions --- p.71 / Chapter Chapter 5 --- Ion Beam Synthesised Cobalt Germanide Alloy by Metal Vapour Vacuum Arc Implantation --- p.73 / Chapter 5.1. --- Introduction --- p.73 / Chapter 5.2. --- Experiments --- p.74 / Chapter 5.3. --- Results and discussion --- p.74 / Chapter 5.3.1. --- XRD --- p.74 / Chapter 5.3.2. --- AFM --- p.78 / Chapter 5.3.3. --- RBS and ion channeling --- p.82 / Chapter 5.4. --- Conclusions --- p.87 / Chapter Chapter 6 --- Tip Artifacts in Atomic Force Microscope Imaging of Ion Bombarded Nanostructures on Germanium Surfaces --- p.89 / Chapter 6.1. --- Introduction --- p.89 / Chapter 6.2. --- Experiments --- p.90 / Chapter 6.3. --- Results and discussion --- p.90 / Chapter 6.4. --- Conclusions --- p.95 / Chapter Chapter 7 --- Conclusions --- p.96 / Bibliography --- p.98 / Publications --- p.105