This study utilizes a modified LIGA process to fabricate a high aspect ratio aspherical micro lens array, which improves low light output of OLED due to its intrinsic total internal reflection. Presently typical OLED extraction efficiency is not high. How to increase OLED extraction efficiency is a valuable topic to discuss. This study analyzes related parameters that influence the formation of micro lenses, for example, the influence of variation of diametric dimension, dry etching parameters and electroforming rate. The experimental results indicate that the tolerance of dimensional variation of the diameter is about 5% during the thermal reflow and dry etching stage. The oxygen content and the photoresist surface during dry etching influence the result. A high electroforming rate is helpful for covering the surface defects on photoresist. An undercut caused by dry etching will discontinue the initial electroformed layers. A apherical microens array can raise the luminance to a maximum of 15 times higher.