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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

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Spelling suggestions: "subject:"entegrated circuits tantalum."" "subject:"entegrated circuits santalum.""

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Atomic layer deposition and properties of refractory transition metal-based copper-diffusion barriers for ULSI interconnect

Lemonds, Andrew Michael, Ekerdt, John G., White, John M., January 2003 (has links) (PDF)
Thesis (Ph. D.)--University of Texas at Austin, 2003. / Supervisors: J. G. Ekerdt and J. M. White. Vita. Includes bibliographical references. Available also from UMI Company.
Integrated circuits Tantalum.

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