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(La0.67Sr0.33MnO3)£»(SrO), LSMO214(n=1) in short, is 2-D magnetic insulator with a structure very similar to the 3D La0.67Sr0.33MnO3 and La0.67Ca0.33MnO3, 113(n=1) in short, which consists of superstructure of a subsequent magnetic layers and insulating layers. Forming a single 214 phase bulk is not easy, a mix phase of 2<n<¡Û compounds is usually seen. In this project, our goal is to search the best growth condition by the traditional method by varying one growth parameter at a time and by the famous Taguchi methods which is based on the statistics and is proved in many systems a best way in studying the association between the film properties and the control factors. First part of this project, we change one growth condition at a time and find the film quality related with the growth condition. Second, we use ¡§Taguchi method¡¨ as bases to form a perpendicular table in which various growth conditions and levels are set. According the table, the number of experiments is limited down to nine. All of the films are examined by structure, electric and magnetic properties to formed the quality data base for films. The traditional method concludes that the higher growth temperature, lower total chamber pressure and high partial pressure ratio of Ar and Oxygen are the corrected way approaching to the single phase, 214, films. However, the result from Taguchi method is contradict to the tradition method, in which the high growth temperature, high total chamber pressure, low partial pressure ratio of Ar and oxygen and the medium RF forward power can approach to growth the single 214 phase film. All films consists mix phases of higher n. This may imply that the growth window for LSMO 214 is relative narrow that we did not set our condition right in that opening.