NDLTD Global ETD Search
  • Refine Query
  • Source
  • Publication year
  • to
  • Language
  • 1
  • Tagged with
  • 1
  • 1
  • 1
  • 1
  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

Search results

Showing 1 to 1 of 1 (0.071 seconds)

Spelling suggestions: "subject:"lithography, alectron bem. electrons"" "subject:"lithography, alectron bem. lectrons""

1

Analysis and correction of three-dimensional proximity effect in binary E-beam nanolithography

Anbumony, Kasi Lakshman Karthi, Lee, Soo-Young. January 2007 (has links) (PDF)
Thesis(M.S.)--Auburn University, 2007. / Abstract. Vita. Includes bibliographic references.
Lithography, Electron beam. Electrons

Page generated in 0.0746 seconds