People for long term exposed to an air-conditioned but highly humid environment are vulnerable to hyper-sensitivity or asthma triggered by fungi or dust mites. This thesis aims to develop a high-linearity and low-hysteresis capacitive relative humidity (RH) microsensor to more precisely accommodate the humidity of living spaces. To reduce the hysteresis and enhance the linearity, this research uses not only one polyimide (PI) thin film as a humidity sensing layer but also utilizes another PI thin film as a protecting layer of the top electrodes. To improve further the RH sensitivity and responding speed, interlacing out-of-plane electrodes are designed in the RH microsensor. The main processing steps of the RH sensor developed in this study involve at least five photolithographic and four thin film deposition processes. The influences of sensing area, number of electrode pairs and testing temperature on the sensitivity and sensing linearity of humidity microsensors were investigated. Based on the measurement results, the sensitivity apparently increase as well as the sensing area (2 mm ¡Ñ 2 mm: 0.12 pF/%RH, 3 mm ¡Ñ 3 mm: 0.48 pF/%RH, 5 mm ¡Ñ 5 mm: 1.09 pF/%RH), and decrease with the number of electrode pairs (40 pairs: 0.51 pF/%RH, 20 pairs: 0.4 pF/%RH) and increase with the testing temperature. The thesis has demonstrated that the capacitance of the RH sensor vary from the relative humidity with a very linear relationship (linearity: 98.8%~99.99%) over the range of 30~70%RH. Finally, to increase effectively the surface area and to reduce further the hysteresis, three-dimensional (3D) moisture entrances and exits were designed and a very low hysteresis value (0.5%RH) can be achieved.

Shape memory alloys (SMAs) have gained much attention as a powerful source of actuation due to their improved performance, reduced size, and reduced complexity between components as well as having a high work output density. Their primary mechanism of actuation relies on a non-diffusional cyclic phase transformation from martensite to austenite, where the amount of thermal energy needed per cycle is directly associated with the hysteresis width between the austenite final and martensite final temperatures. Consequently, a narrower gap between those two temperature ranges requires a much lower energy demand to produce the actuation needed. Previous studies have indicated that the hysteresis width is linked to a strong coherence between the austenite/martensite interface. It has been shown that elemental additions to NiTi-based SMAs can further improve this coherency. Another huge challenge facing this unique technology is linked with its thermo-mechanical stability. Binary NiTi SMAs often exhibit significant transformation temperature shifts after each thermo-mechanical cycle, which can contribute to a shorter lifespan. The primary goal of this project is to identify and develop thermo-mechanically stable, low hysteresis shape memory alloys (LHSMAs) for actuator applications. To accomplish this goal, elemental additions of Cu, Co, Hf, and Pd were incorporated into NiTi-based SMAs and the results were compared in respect to their hysteresis width and thermo-mechanical stability through differential scanning calorimetry, scanning electron microscopy with energy dispersive spectroscopy, and compressive thermo-mechanical testing. Two quaternary SMAs containing small additions of Cu and Pd were shown to exhibit promising results with respect to hysteresis width and good thermo-mechanical stability.