NDLTD Global ETD Search
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  • About
  • The Global ETD Search service is a free service for researchers to find electronic theses and dissertations. This service is provided by the Networked Digital Library of Theses and Dissertations.
    Our metadata is collected from universities around the world. If you manage a university/consortium/country archive and want to be added, details can be found on the NDLTD website.

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1

ETCHING TECHNOLOGIES IN SUPPORT OF THE DEVELOPMENT OF A COHERENT POROUS SILICON WICK FOR A MEMS LHP

SURYAMOORTHY, SOWMYA 31 March 2004 (has links)
No description available.
Silicon Electrochemical Etching
MEMS/MST fabrication
Coherent, Nanoporous Silicon

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