Les systèmes microélectromécaniques (MEMS) sont des dispositifs de taille micrométrique capables de transformer un signal mécanique en un signal électrique et vice-versa. Ils sont aujourd'hui largement répandus dans notre vie quotidienne pour la détection, la transformation de l'énergie et l'actionnement de dispositifs grâce à leur faible dissipation énergétique, leur réponse ultra-rapide et leur grande sensibilité. Même si depuis plusieurs décennies, les progrès technologiques ont entraîné la miniaturisation des ces dispositifs, il reste nombreux challenges à surmonter dont l'un des plus importantes est l'intégration à l'échelle nanométrique d'actionneurs à base des matériaux dit " intelligents " (à ces dimensions, les matériaux habituellement utilisés perdent leurs propriétés d'actionnement). Dans ce contexte, ce travail de thèse avait pour objectif d'explorer l'utilisation des matériaux moléculaires à transition de spin pour le développement d'actionneurs électromécaniques. Dans ce but, nous avons conçu des microleviers en silicium que nous avons recouvert par différentes molécules à transition de spin soit par sublimation, soit par " spray-coating ". Les MEMS ont été caractérisés à température et pression variables en modes dynamique et statique à l'aide d'un unique dispositif expérimental. Les résultats obtenus démontrent que les molécules à transition de spin peuvent être intégrées, à l'aide de différents procédés de fabrication, dans des dispositifs MEMS et qu'il est possible de réaliser l'actionnement à l'aide d'une source d'énergie thermique (chauffage et refroidissement) et/ou lumineuse. Simultanément, cette étude a également permis d'évaluer les propriétés mécaniques des matériaux à transition de spin (module de Young, coefficient de Poisson) qui restent mal connues. / Microelectromechanical systems (MEMS) are micrometric devices able to transform a mechanical signal into an electrical one and vice-versa. In the past years they have been successfully employed in different fields of our everyday life for sensing, transducing different forms of energy and for actuating purposes thanks to their low energy dissipation, fast response and high sensibility. Even if recent technological progress has allowed a considerable miniaturization of these devices, several challenges remain. In particular the integration of smart actuating materials at the nanometric scale remains arduous because in most cases they lose their actuating properties at reduced sizes. In this context, this thesis work aimed for exploring the possibility of using molecular spin crossover materials for the development of electromechanical actuators. To this aim we have conceived silicon microcantilevers, which have been coated by various spin crossover molecules using either thermal evaporation or spray-coating methods. The MEMS have been characterized at variable temperature and pressure both in dynamical and static modes using a single experimental setup. The results prove that spin crossover molecules can be successfully integrated into silicon MEMS devices using different fabrication processes and their actuation can be achieved using either a thermal energy source or light irradiation. In parallel, this work has allowed us to extract relevant mechanical properties of spin crossover materials (Young's modulus, Poisson's ratio), which have been largely unknown previously.

Este trabalho apresenta o desenvolvimento de um sensor térmico de vazão integrado a um microcanal. Todo o ciclo de desenvolvimento é abordado: conceito, modelagem e simulação, fabricação e caracterização. O sensor é composto por um filamento de níquel fabricado sobre uma lâmina de vidro que é soldada a um bloco de polidimetilsiloxano (PDMS) contendo microcanais. A aferição da vazão no interior do microcanal é feita indiretamente através da medida da troca de calor entre o filamento e o fluido. As simulações por elementos finitos mostraram que o sensor apresenta três faixas de operação, sendo que em duas delas (fluxos menores do que 20 L/min ou maiores do que 130 L/min) a resposta elétrica do sensor varia linearmente com a vazão. Diversos sensores foram fabricados seguindo o processo de fabricação proposto e alguns dispositivos foram caracterizados eletricamente, tendo sido levantadas as curvas da tensão elétrica sobre o filamento em função da vazão no microcanal. Os resultados experimentais mostraram que os sensores fabricados são capazes de medir vazões da ordem de dezenas de microlitros por minuto na faixa de operação de menor sensibilidade. Métodos de fabricação alternativos foram propostos com o intuito de aumentar a sensibilidade do sensor, produzindo filamentos auto-sustentados no interior dos microcanais. Foi proposto um modelo para simulação comportamental dos sensores otimizados por elementos concentrados e os resultados preliminares tanto de simulação quanto de fabricação desses sensores foram apresentados. / This project presents the development of a thermal flow sensor integrated into a microchannel. The whole design cycle is discussed: concept, modeling and simulation, fabrication and characterization. The sensor consists of a nickel filament fabricated on a glass substrate which is bonded to a polydimethylsiloxane (PDMS) block containing the microchannels. The flow inside the microchannel is indirectly measured through the heat exchange between the filament and the fluid. Finite methods analysis revealed that the sensor has three operating ranges and in two of them (flows below 20 ìL/min or higher than 130 ìL/min) the electric response of the sensor varies linearly with respect to the flow. Several flow sensors were fabricated according to the fabrication method presented in this project and some of them were characterized electrically. The response of the voltage on the filament as a function of the flow inside the microchannel was obtained. The experimental results demonstrated that the flow sensors could measure flow rates as small as tens of microliters per minute even when working on the less sensitive operating range. Alternative fabrication methods were proposed in order to improve the sensor sensitivity, leaving the filaments self-sustained inside the microchannels. A lumped element model was introduced in order to simulate the behavior of the optimized flow sensors. Some preliminary results of these simulations and of the fabrication processes were presented.

Este trabalho tem o objetivo de modelar um sistema composto por alimentador industrial vibratório, comando eletrônico e sensor acelerômetro Microelectromechanical systems - MEMS. O alimentador vibratório é um equipamento industrial utilizado para alimentação automática de peças diversas em plantas ou processos industriais semiautomáticos ou totalmente automáticos. Separa e organiza a sequência de inserção de peças em processo automático de fabricação e montagem. O modelo proposto neste trabalho reproduz o comportamento ondulatório e periódico da vibração, gerada pelo movimento descrito pela bacia do alimentador. Apresenta a análise dos resultados obtidos por meio de simulação computacional do modelo proposto, confrontados com os resultados obtidos experimentalmente. O experimento proposto tem um comando eletrônico para o acionamento do alimentador industrial vibratório. A tensão de entrada (setpoint) define a potência elétrica entregue a uma bobina eletromagnética, parte integrante do alimentador vibratório, responsável por gerar as vibrações mecânicas. Os resultados obtidos indicam que o modelo é viável. / This paper presents proposed model for a system composed of industrial vibratory feeder, electronic control and accelerometer sensor Microelectromechanical systems - MEMS. The vibrating feeder is an industrial equipment used for automatic feeding of parts in various plants or industrial processes semiautomatic or fully automatic. Separates and organizes the insertion sequence parts in automatic fabrication and assembly. The proposed model reproduces the wave behavior and periodic vibration generated by the movement described by bowl feeder. Presents the analysis of the results obtained by computer simulation of the proposed model, compared to the results obtained experimentally. The proposed experiment has an electronic command to the firing of industrial vibratory feeder. The input voltage (setpoint) defines the electrical power delivered to an electromagnetic coil, part of vibratory feeder, responsible for generating mechanical vibrations. The results indicate that the model is feasible.

Le packaging sous vide des capteurs résonants (accéléromètres, gyromètres), des oscillateurs à quartz utilisés dans les références de temps ou encore des bolomètres est indispensable pour obtenir de très hautes performances et les maintenir dans le temps. Le faible volume de la cavité sous vide nécessite un pompage in-situ pour compenser les fuites et maintenir le vide pendant toute la durée de vie des dispositifs. Ce pompage peut être réalisé par l'insertion dans la cavité de matériaux getter, qui constituent un système intégré de pompage à l'état solide par adsorption et piégeage des molécules de gaz.Nous avons étudié les phénomènes d’interdiffusion et comparé la capacité de sorption de films getters de titane, vanadium ou zirconium protégés par une couche ultramince d'or. Les propriétés des films ont été analysées en utilisant différentes techniques: mesure de résistivité 4 pointes, XRD, MEB, XPS et SIMS après différents traitements thermiques. Les résultats montrent que le système Au/Zr est le meilleur candidat à la fonction de matériau getter grâce au démouillage de l'or après traitement thermique : 70 nm de Zr est oxydé en ZrO2 après un recuit à 300 °C pendant 1h, ce qui correspond à 7,5 10-7 moles d'oxygène absorbées. Toutefois ce système Au/Zr réagit déjà à 200 °C-1h, une température qui peut s'avérer trop basse pour des applications de packaging sous vide. Ainsi, l'empilement Au/Zr/V/Zr a été proposé pour mieux cibler la température d'activation autour de 300°C tout en gardant une capacité de sorption importante. / The vacuum packaging of resonant sensors (accelerometers, gyroscopes) and quartz oscillators which are used for time references or bolometers is needed in order to reach high performances on a long term. The low volume of the cavity requires an in-situ gas pumping to compensate the leaks and maintain the vacuum during all the lifetime of the device. This pumping can be achieved by the integration of getter materials into the cavity, behaving as an integrated solid state pumping system based on the adsorption and the trapping of the gas molecules.We have studied the interdiffusion phenomena and compared the sorption capacity of titanium, vanadium or zirconium getter film protected by a thin gold layer. The properties of these films were analysed by various techniques: 4 point probe resistivity measurement, XRD, SEM, XPS and SIMS after different thermal treatments. The results show that the Au/Zr system is the best candidate thanks to the gold dewetting after thermal treatment: 70 nm of Zr has been oxidized to ZrO2 after annealing at 300 °C-1h, which is corresponding to the absorption of 7,5 10-7 moles of oxygen. However Au/Zr system already reacts at 200 °C-1h, a too low temperature for packaging applications under vacuum. Thus, the multilayer Au/Zr/V/Zr was proposed to target an activation temperature around 300 °C while keeping a high sorption capacity.

<p dir="ltr">Gyroscopes have become an integral part of many application spaces ranging from consumer electronics to navigation. As navigation and movement tracking becomes necessary through inertial measurement units (that comprises gyroscopes and accelerometers) in myriad of scenarios especially when global navigation and satellite system (GNSS) is not available, stability of gyroscopes plays a detrimental role in the accuracy of navigation. Recent developments in micro-electromechanical systems (MEMS) based gyroscopes enabled them to penetrate into navigation grade application spaces. MEMS based miniaturization approach also revived the interest in nuclear magnetic resonance gyroscopes (NMRGs). In parallel, emerging atomic gyroscope technologies are getting attention such as using quantum defects in single crystal diamond. </p><p><br></p><p dir="ltr">Considering innovative ways MEMS can improve gyroscopes, we investigate solid state gyroscope technologies in piezoelectric MEMS and nuclear spin based platforms for next generation rotation sensing that is shock and vibration insensitive. For the first part of this study, we explore a piezoelectric resonator that can excite wine-glass mode (WGM) and tangential mode. WGM is used for rotation sensing applications in various excitation mechanisms in literature. However, we demonstrate the capability of exciting WGM without the need for segmented electrodes in piezoelectric domain that allows self-alignment of the excitation electrodes using a unique property of Lead Magnesium Niobate-Lead Titanate (PMN-PT). In the second part of the study, we explore Nitrogen-Vacancy (NV) centers in diamond to be used as gyroscopes exploiting the rotation sensitivity of nuclear spins. NV center-based gyroscopes provide solid-state solution with comparable or superior performance without any moving parts. We propose mechanical coupling to NV centers in diamond using piezoelectrically excited bulk acoustic waves (BAW) to extend the coherence time of nuclear spins by dynamical decoupling. We explore piezoelectric coupling design space of AlN thin film BAW resonators (FBARs) to enable efficient mechanical drive to improve Rabi oscillations in diamond to overcome one of the most important bottlenecks of realizing a gyroscope, which is the mitigation and control of nuclear spin and electron spin interaction in diamond NV center system.</p>

The next generation of miniaturized satellites (“nanosats”) feature dramatically reduced thrust and impulse requirements for purposes of spacecraft attitude control and maneuvering. E↵orts at the University of Vermont have concentrated on developing a MEMS-based chemical micropropulsion system based on a rocket grade hydrogen peroxide (HTP) monopropellant fuel. A key component in the micropropulsion system is the catalytic reactor whose role is to chemically decompose the monopropellant, thereby releasing the fuel’s chemical energy for thrust production. The present study is a joint computational and experimental design e↵ort at developing a MEMS-based micro-reactor for incorporation into a monopropellant micropropulsion system. Numerically, 0D and simplified 2D models have been developed to validate the model and characterize heat and mass di↵usion in the channel. This model will then be extended to a 2D model including all geometric complexities of the catalyst bed geometry with the goal of optimization. Experimentally, both meso and micro scale catalyst geometries have been constructed to prove the feasibility of using RuO2 nanostructures as an in situ in a microchannel.

In this thesis, the design, fabrication and characterisation of graphene electromechanical resonators have been presented. Graphene features ultrahigh Young’s modulus and large surface to volume ratio that make it ideal for radio frequency (RF) components, sensors and other micro/nano-electromechanical systems (MEMS/NEMS). A novel batch fabrication process for graphene electromechanical resonators has been developed by using poly-Si film as sacrificial layer. Previously reported fabrication processes of graphene resonators use SiO2 as sacrificial layer only because graphene is visible on 300nm SiO2/Si substrate. However, the wet etching of SiO2 involves HF, which is not compatible with metal connections or SiO2 serving as dielectric or passivation layer in graphene NEMS devices. Moreover, the liquid surface tension during drying after wet etching could damage graphene bridges even critical point drying is used. Therefore, in this work, poly-Si is adopted as the sacrificial material. To facilitate the fabrication of graphene resonators, a poly-Si/SiO2/Si substrate has been designed and optimised to make graphene visible under optical microscope for the first time to the author’s knowledge. Chemical vapour deposition (CVD)-grown monolayer graphene sheet has been transferred onto the optimised poly-Si/SiO2/Si substrate and patterned into strips. Metal electrodes have been deposited by lift-off process to make electrical connections, which is prerequisite for integrating graphene resonator into practical devices. The graphene bridges have been released by etching the poly-Si layer with XeF2 in vapour phase, which completely avoids the capillary force induced damage to the graphene bridges. De-fluorination process has been performed by hydrazine reduction to recover graphene’s conductivity. This fabrication process is scalable for massive production of graphene electromechanical resonators, thus furthering their practical application. One-source current mixing characterisation setup has been constructed to test the graphene resonators. Besides the fundamental peak, the activation and enhancement of the second mode of doubly clamped resonator by electrostatic actuation have been observed for the first time. The second mode amplitude reaches 95% of the fundamental mode, whereas only odd higher modes of small intensity have been reported before in other MEMS/NEMS resonators actuated by electrostatic force or magnetomotive force. The findings in this thesis could lead to substantial increase of the sensitivity of sensors based on the graphene resonators. Modal analysis based on Euler-Bernoulli equation has been performed to understand the mechanism behind the activation and enhancement of the second mode. Finite element analysis agrees very well with experimental results and complies with the theoretical model. Finally, a set of novel alignment marks has been designed, which can be incorporated to process mechanically exfoliated 2D material flakes of micron size and irregular shape with conventional photolithography tools, as have been demonstrated by the successful fabrication of a graphene transistor. This optical alignment technique provides an alternative for prototype device development besides electron beam lithography to prevent electron-induced damage to fragile 2D materials.

Le nitrure de gallium (GaN) est un matériau semi-conducteur dont la filière est en plein essor. Ses propriétés ont permis d’en faire le deuxième matériau semi-conducteur le plus utilisé pour les composants optiques et électroniques, après le silicium. Cependant, comparativement à ces domaines, peu d’études ont été menées quant à la réalisation de microsystèmes électromécaniques (MEMS) malgré des propriétés mécaniques favorables. Dans ce contexte, ces travaux présentent le développement de premiers accéléromètres MEMS résonants en filière GaN. Ces derniers reposent sur l’utilisation de poutres vibrantes possédant une forte contrainte mécanique en tension, avec un actionnement et une détection électriques intégrés. La présence de contrainte modifie significativement les performances de l’accéléromètre. Une étude théorique analytique de l’impact de la contrainte démontre ses bénéfices, notamment en termes de facteur de qualité et d’étendue de mesure. Les étapes du procédé de fabrication des composants ont été développées. Enfin, la caractérisation des accéléromètres démontre de très bonnes performances par rapport à l’état de l’art des autres filières technologiques et en accord avec les modèles préalablement établis. / The gallium nitride (GaN) is a semiconductor material for which the sector is rapidly expanding. Thanks to its properties, it have become the second most used semiconductor material for optic and electronic components, after the silicon. However, relatively to those sectors, few studies have been performed about the production of microelectromechanical systems (MEMS) despite the favorable mechanical properties. In this frame, this work presents the development of first resonant MEMS accelerometer in GaN. They are based on the use of vibrating beams which have a high tensile stress, with an integrated electrical actuation and detection. The existence of stress results in a significant modification of the performances of the accelerometer. An analytical theoretical study of the impact of the stress demonstrates its benefits, particularly for the quality factor and the measuring range. The process flow for the fabrication of the component has been developed. Finally, the characterization of the accelerometers shows very good performances compared to the state of the art of the other technologies and in agreement with the models previously established.

This thesis constitutes the documentation for a Doctoral research program undertaken at the Industrial Research Institute of Swinburne University of Technology (IRIS) between 2001 and 2005. The focus of the research was an investigation of the open- and closed-loop response of piezoelectric micro-pumps for micro-fluidic applications, particularly for chemical and biomedical environments. Specifically, in order to successfully integrate micro-devices into functional systems, it was important to address issues of real-time performance monitoring and control. The research addresses some of these problems in the context of a piezoelectric-driven micro-pump, equipped with interferometric displacement feedback, which was used to measure the dynamic displacement of the micro-pump actuator surface. During the course of the research, both a discrete component and a fully integrated (laboratory-on-a-board) test system were developed for open-loop characterization of the micro-pump. The laboratory-on-a-board system was also used for closed-loop control application. Measurements showed significant differences in actuator velocity, displacement and settling time between different pumping media. In addition, transient underdamped vibration of the actuator surface was observed during the rapid excursion and recursion phases of the pump movement while pumping air. These non-contact measurements could be used to determine the open-loop characteristics of a micropump and provide information for design improvement or failure detection/analysis. The technique could also be used to provide continuous measurement for adaptive compensation, so that the pump performance criteria are always satisfied. To this end, an automated interference fringe counting algorithm was developed, so that the steadystate parameters could be mapped into the closed-loop control elements in real time. The performance of this algorithm is discussed herein, together with the implications for optimal control of the micro-pump, and eventual integration of the interferometer and micro-pump systems. The research indicated that there were potential benefits in closed-loop control of micro-pumps, particularly where failure detection was required and for pumping of non-homogeneous media. The thesis also documents the relative performance differences between open and closed-loop control in homogenous media.

Polycrystalline films are used in a wide array of micro- and nano-scale devices, for electronic, mechanical, magnetic, photonic and chemical functions. Increasingly, the properties, performance, and reliability of films in these systems depend on nano-scale structure. In collaborative research with a number of SMA Fellows, Associates, and students, our group is carrying out research focused on probing, modeling and controlling nano-scale structural evolution during both vapor-phase and solid-phase polycrystalline film formation. In particular, high-sensitivity in-situ and real-time stress measurements are being used to study atomic scale forces and to characterize structure formation and evolution at the nano-scale. In other collaborative research, the affects of controlled structure and multi-film architectures on properties, such as piezoelectric characteristics and electromigration-limited reliability, are being explored. Through these interrelated activities, basic principles of the science and engineering of nano-scale materials are emerging. / Singapore-MIT Alliance (SMA)