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Fabrication of Semiconductor filtersChen, Yun-Shuang 30 June 2003 (has links)
In this thesis, S-bend waveguides and ring resonant filters with multimode interference (MMI) couplers have been designed and fabricated.
The single-ring filters are designed to have free spectral ranges ( FSR's) of 33.3GHz, 40GHz and 50GHz. The FSR's of double-ring filters are 100GHz and 200GHz. The splitting ratios of the 9-
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Ultra-compact integrated silicon photonics balanced coherent photodetectorMeyer, Jason T., Fallahi, Mahmoud 13 February 2016 (has links)
In this paper, the performance simulations of a novel ultra-compact balanced coherent photodetector for operation at a wavelength of 1.5 mu m are presented and design proposals for future fabrication processes are provided. It consists of a compact 2x2 MMI that is evanescently coupled into a germanium MSM photodetection layer. The simulations demonstrate dark current less than 10 nA, capacitance less than 20 fF, and optical bandwidth in the 10-30 GHz range. We propose utilizing the simplicity of direct wafer bonding to bond the detection layer to the output waveguides to avoid complicated epitaxial growth issues. This ultra-compact device shows promise as a high-speed, low-cost integrated silicon photonics solution for the telecommunications infrastructure.
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