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Development of a large displacement flexure based nano-precision XY positioning stage for vacuum environmentsChoi, Yeong-jun, Sreenivasan, S. V., January 2003 (has links) (PDF)
Thesis (Ph. D.)--University of Texas at Austin, 2003. / Supervisor: S. V. Sreenivasan. Vita. Includes bibliographical references. Available also from UMI Company.
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